A kind of preparation method of graphene-based sensor
A graphene-based sensor technology, applied in the field of sensors, can solve the problems of large influence of annealing temperature characteristics, slow progress, difficulty in film formation of graphene dispersion, etc., to improve product performance, marketization process, and easy control Effect
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[0021] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.
[0022] The present invention will be described in further detail below in conjunction with 1-4 and specific examples. It should be noted that the drawings are all in a very simplified form, using imprecise scales, and are only used to facilitate and clearly achieve the purpose of assisting in describing the present embodiment.
[0023] see figure 1 , the preparation method of the graphene-based sensor of the present embodiment, comprises the following steps:
[0024] Step 01: See figure 2 , sequentially forming a lower electrode layer 02, a bottom isolation lay...
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