Displacement sensor calibration device based on air-floating platform

A displacement sensor and calibration device technology, applied in the direction of measuring devices, instruments, etc., can solve the problems of large mechanical vibration, large return error, and low measurement accuracy, and achieve the effects of reducing return error, improving calibration accuracy, and high measurement accuracy

Pending Publication Date: 2017-12-26
CHONGQING JIANSHE IND GRP
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Problems solved by technology

However, the current calibration device for calibrating the displacement sensor through the laser interferometer usually uses a screw guide rail platform, which has a large return error and large mechanical vibration, resulting in low measurement accuracy.

Method used

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  • Displacement sensor calibration device based on air-floating platform

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Embodiment Construction

[0020] Embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.

[0021] In this embodiment, the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "rear", "upper end" and "lower end" are based on the orientation or positional relationship shown in the drawings, It is for the convenience of description only, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, or operate, and thus should not be construed as limiting the present invention.

[0022] Such as figure 1 The shown a kind of displacement sensor calibration device based on the air-floating platform includes a marble platform 1, an air-floating linear platform 2 installed on the marble platform 1; A closed-loop high-precision control system composed of a linear motor 9, the grating ruler 8 is fixed on the ...

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Abstract

The invention provides a displacement sensor calibration device based on an air-floating platform, comprising a marble platform and an air-floating linear platform installed on the marble platform; and a grating ruler and a linear motor are arranged on the air-floating linear platform. The closed-loop high-precision control system, the grating ruler is fixed on the air-floating linear platform along the length direction of the air-floating linear platform; along the length direction of the air-floating linear platform, there are laser interferometers, beam splitters, reflectors located on the same axis in sequence. mirror and displacement sensor; the reflector is mounted on an air-floating slider, the air-floating slider is slidably arranged on the air-floating linear platform, which is connected with the linear motor, and is driven by the linear motor on the lower edge The air-floating linear platform slides and locks relatively. The device greatly reduces the occurrence of return error, mechanical vibration, crawling, etc. during the calibration process, and greatly improves the calibration accuracy.

Description

technical field [0001] The invention relates to the technical field of verification and calibration, in particular to a displacement sensor calibration device based on an air-floating platform. Background technique [0002] Displacement sensors are also called linear sensors, which sense changes in length and convert them into electrical signal outputs, and are often used to measure lengths such as displacement and distance. Displacement sensors have a wide range of applications, commonly used in industries or construction bridges, and are widely used in testing in various industries. [0003] In order to ensure the measurement accuracy and reliability of the displacement sensor, the sensor needs to be calibrated regularly. At present, the calibration of the displacement sensor with high precision is mainly provided by the laser interferometer to provide the standard displacement, and the displacement sensor detects the standard displacement to obtain the relationship betwe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/02
CPCG01B21/042
Inventor 刘学明罗钧张平陈建端柳政李明虹牛增
Owner CHONGQING JIANSHE IND GRP
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