Evaporation machine and its cold plate structure
A technology of vapor deposition machine and cold plate, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems such as the cold plate of the deposition machine and the glass substrate cannot be closely attached, and the color mixing is poor. , to achieve the effect of reducing poor color mixing, reducing the probability of occurrence, and overcoming its own sagging
Active Publication Date: 2020-06-30
TRULY HUIZHOU SMART DISPLAY
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Problems solved by technology
[0005] Based on this, it is necessary to address the problem of poor color mixing due to the self-sag of the glass substrate, especially the large-size and heavy-weight glass substrate, which has a large self-sag, which causes the cold plate of the evaporation machine and the glass substrate to not fit closely. For technical problems with a high probability of occurrence, an evaporation machine and its cold plate structure are provided
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[0023] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.
[0024] In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may ...
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An evaporation machine and its cold plate structure, wherein the cold plate structure is used for lamination with a substrate to be evaporated, and the cold plate structure includes: a cold plate, which is used for lamination with the substrate; The component includes a charge generation unit, a charge transfer unit, and a charge receiver unit, the charge generation unit is used to generate charges, the charge generation unit is connected to the charge transfer unit, the charge transfer unit is connected to the charge receiver unit, the charge transfer unit is used to transfer charges, and the charge receiver The unit is used to receive charge and generate static electricity to make the cold plate electrostatically attract the substrate. The above-mentioned vapor deposition machine and its cold plate structure, after bonding the cold plate and the substrate, make the charge generating unit generate charges, and the charge receiving unit stores the charges to generate static electricity, so that the cold plate electrostatically adsorbs the substrate, so that the glass is under the action of static electricity , can overcome the self-sagging caused by gravity, so that the cold plate and the substrate of the evaporation machine can be closely attached, reducing the probability of poor color mixing.
Description
technical field [0001] The invention relates to the field of display technology, in particular to an evaporation machine and its cold plate structure. Background technique [0002] Due to the characteristics of OLED (Organic Light-Emitting Diode, organic light-emitting diode) display, such as self-illumination, wide viewing angle, low power consumption, short response time, thin panel and flexibility, etc., it has become a very popular emerging technology at home and abroad in recent years. flat panel display products. [0003] OLED can be divided into AM-OLED (Active Matrix Organic Light Emitting Diode, active drive organic light emitting diode) and PM-OLED (Passive Matrix Organic Light Emitting Diodes, passive drive organic light emitting diode) according to the driving method. Due to the limitation of the method, it is only applied to small-sized panels, and the application range is small; while each sub-pixel unit of AM-OLED has a TFT (ThinFilm Transistor, thin film tra...
Claims
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IPC IPC(8): C23C14/24H01L51/56
CPCC23C14/24H10K71/164
Inventor吴炜钦罗武峰蔡晓义袁建南何文双柯贤军苏君海李建华
OwnerTRULY HUIZHOU SMART DISPLAY