Optical element for slowing down or eliminating damage of back surface of laser-induced optical element
An optical element, laser-induced technology, applied in the direction of optical elements, optics, instruments, etc., can solve the problem of easy damage to the back surface of the substrate of the optical element, so as to slow down or eliminate the damage of the back surface, slow down or eliminate the reflection, and eliminate the back surface The effect of injury problems
Active Publication Date: 2018-06-29
SICHUAN UNIV
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Problems solved by technology
[0003] The purpose of the present invention is to solve the problem that the rear surface of the current optical element substrate is easily damaged, and to provide an optical element that slows down or eliminates laser-induced damage to the rear surface of the optical element
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Embodiment
[0013] An optical element that slows down or eliminates laser-induced damage to the rear surface of the optical element in an embodiment of the present invention, its structural schematic diagram can be found in figure 1 , including substrate 1, required film 3 and buffer layer film 2, wherein buffer layer film 2 is located between the rear surface of substrate 1 and required film 3, the acoustic impedance value of the material used for buffer layer film 2 is the same as that of substrate 1 material The absolute value of the subtracted acoustic impedance value is less than or equal to the product of the added acoustic impedance of the substrate and material and the stress coefficient, where the stress coefficient determines the tensile stress threshold and shock wave peak value of the component, and is numerically equal to the ratio of the two.
[0014] In this example, the thickness of the buffer layer film 2 can be selected according to the actual situation, so as to ensure t...
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The invention relates to an optical element technology, solves the problem that the back surface of a current optical element substrate is easily damaged, and provides an optical element for slowing down or eliminating the damage of the back surface of a laser-induced optical element. The optical element is characterized by comprising a substrate, required film and buffer-layer film, the buffer-layer film is located between the back surface of the substrate and the required film, the absolute value obtained by subtraction of an acoustic impedance value of a material used for the buffer-layer film and an acoustic impedance value of a material used for the substrate is less than the product of an additive value of the acoustic impedance of the substrate and the material and a stress coefficient, the stress coefficient determines a tensile stress threshold value and a shock wave peak value of the element, and the numerical value is equal to the ratio of the tensile stress threshold valueto the shock wave peak value. The optical element has the advantages of slowing down or eliminating the damage of the back surface of the optical element substrate, which is suitable for optical elements.
Description
technical field [0001] The invention relates to the technology of optical elements, in particular to the technology of damage to the rear surface of the substrate of the coated optical element. Background technique [0002] During the operation of high-energy / power laser systems such as ICF laser drivers and high-energy lasers, laser damage will inevitably occur. Laser-induced damage to optical components has become one of the key factors restricting the improvement of the output laser pulse capability. In the actual operation process Among them, it will be found that the probability of laser-induced damage on the back surface (exit surface) of the optical element substrate is much greater than that on the front surface (incident surface), and the main mechanism is: the inverse bremsstrahlung effect of the laser plasma on the front surface will The truncation of the transmitted laser makes the laser pulse energy precipitate into the air, thereby reducing the deposition of th...
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IPC IPC(8): G02B1/10
CPCG02B1/10
Inventor 韩敬华冯国英沈雄姜越周寿桓
Owner SICHUAN UNIV