Heat treatment equipment

Abstract

Provided is heat treatment equipment wherein a conveyance unit for conveying an object to be treated is guided to a position facing a treatment chamber for heat-treating the object so that the objectis transferred between the conveyance unit and the treatment chamber while the conveyance unit and the treatment chamber are connected hermetically by an extendable connection member. The heat treatment equipment is provided with a maintaining means for maintaining, when the pressure inside the connected portion between the conveyance unit and the treatment chamber connected by the connection member is reduced, a constant distance between the conveyance unit and the treatment chamber by causing a force to act between the conveyance unit and the treatment chamber.

Description

technical field [0001] The present invention relates to a heat treatment facility provided with a treatment chamber for heat-treating a treatment object and a transport unit for transporting the treatment object to the treatment chamber, in a state where the transport unit is moved to a position facing the treatment chamber , the telescopic connection member that is located at any one of the opposite parts of the transport unit and the processing chamber is extended, so that the transport unit and the processing chamber are connected in a sealed state by using the above connection member, and the connected transport unit and the processing chamber are connected to each other in a sealed state. The processing object is transferred between the chambers. It is characterized in that when the connection part of the conveying unit and the processing chamber connected by the connecting member is decompressed, the position of the conveying unit and the processing chamber will not be sh...

AI Technical Summary

Problems solved by technology

[0007] However, as shown in Patent Documents 1 and 2, when the entire transport unit is slid toward the processing chamber formed of a heating chamber and a cooling chamber in an opposing state, since the weight of the entire transport unit is large, there are the following problems : In order to slide the conveying unit as a whole, a large driving device, a guide mechanism, etc. are required, and the cost becomes very high and the size of the device becomes large

[0011] However, in the expansion and contraction device shown in Patent Document 4, there is a problem that when the connecting member is extended so that only the force connecting the transport unit and the processing chamber exists and the connection portion between the transport unit and the processing chamber is reduced as described above, In the case of pressing, the transport unit and the processing chamber are pulled each other by the connecting part, and there is no force that can resist the above-mentioned movement. In addition, even if the connecting member is elongated by the above-mentioned telescopic device, the pressure action of the above-mentioned moving size can be resisted. Between the transport unit and the processing chamber, due to the above-mentioned excessive pressure, the positions of the transport unit and the processing chamber may be shifted, or the sealing member may be pressed hard, so that the elastic force is lost, and proper sealing cannot be performed.

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