Detection system and detection method of high-throughput combined material chip

Abstract

The invention provides a detection system and a detection method for a high-throughput composite material chip. The detection method includes the steps of: adjusting the position of the calibration light source, so that the coordinates of the spot center of the calibration light source are the same as those of the spot center of the X-ray emitting device. The coordinates coincide; the control device controls the sample stage to move the high-throughput composite material chip array, so that the coordinates of the first sample center of the high-throughput composite material chip array coincide with the coordinates of the spot center of the calibration light source; the control device controls the sample stage to move A high-throughput composite material chip array, so that the X-rays emitted by the X-ray emission device are incident on the sample of the high-throughput composite material chip array in turn; the data processing device sequentially obtains the measurement beam diffracted by the sample of the high-throughput composite material chip array and analyze the measurement beam. The detection system and the detection method thereof can realize automatic, rapid and effective detection of the samples of the high-throughput composite material chip array.

Description

technical field [0001] The invention relates to the technical field of X-ray diffraction, in particular to a detection system and a detection method of a high-throughput combined material chip. Background technique [0002] The research and development of new materials is the foundation and forerunner of the national economy and national defense construction, and its research and development speed often becomes the decisive factor in the development of high-tech products. The traditional material research method characterized by trial and error is time-consuming and laborious, which greatly restricts the speed of material innovation. High-throughput combined material chip synthesis technology, using coating and masking technology to form multiple arrays of discrete component samples through multiple masks, to achieve high-throughput combined material chip preparation, to exponentially speed up the preparation of new materials, thereby accelerating The synthesis and screenin...

AI Technical Summary

Problems solved by technology

Due to the large focal spot of the X-ray beam and the single structure of the sample stage, the existing X-ray diffraction equipment cannot perform effective, automatic and rapid characterization of its structure

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