Novel displacement sensor with refractors and measuring method thereof

A technology of displacement sensor and refractor, which is applied in the field of measurement, can solve problems such as the influence of sensor magnification and the decrease of PSD measurement accuracy, and achieve the effect of increasing magnification and improving measurement accuracy

Pending Publication Date: 2019-03-08
BEIFANG UNIV OF NATITIES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the measurement magnification of the displacement sensor is related to the incident angle of the PSD, and the magnification of the sensor is easily affected, that is, when the incident angle of the laser beam incident on the PSD increases, the measurement accuracy of the PSD itself will decrease.

Method used

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  • Novel displacement sensor with refractors and measuring method thereof
  • Novel displacement sensor with refractors and measuring method thereof
  • Novel displacement sensor with refractors and measuring method thereof

Examples

Experimental program
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Embodiment 1

[0042] see Figure 2-3 In this embodiment, a novel displacement sensor with a refractor is provided, including a laser source 1, a triangular wave reflector 3, a reflector 4, a beam splitter group 5, two refractors 6, two photodetectors 7, Wherein, the triangular wave reflector 3 includes a plurality of reflective surfaces. For ease of understanding, the reflective surface for receiving the laser beam emitted by the laser source is defined as the first reflective surface herein. In addition, the reflective mirrors and reflective mirrors mentioned in this article refer to optical devices arranged in different positions, but they all refer to optical devices with reflective effects, and are named reflective mirrors and reflective mirrors respectively to facilitate distinction and avoid excessive The numerical limitations of the cause confusion. Both the reflecting mirror and the reflecting mirror can adopt a total reflecting mirror.

[0043] In this new displacement sensor wit...

Embodiment 2

[0077] can refer to Figure 5 Compared with the refraction displacement sensor described in Embodiment 1, the refraction displacement sensor in this embodiment differs in that the refraction displacement sensor provided in this embodiment includes two reading heads, and the structure of the two reading heads consistent, and the positional relationship between the two reading heads satisfies: during the measurement process, at least one reading head can read the incident position variation of the laser beam on the photodetector.

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Abstract

The invention provides a novel displacement sensor with refractors and a measuring method thereof. The novel displacement sensor with the refractor comprises the components of a reflector which is used for receiving a laser beam that is reflected from a first reflecting surface of a triangular wave reflector, makes the laser beam be reflected to a second reflecting surface of the triangle wave reflector in a measuring process in which the laser beam is incident into the same first reflecting surface; and a spectroscope set which comprises a spectroscope and a light reflector, wherein the spectroscope and the light reflector are arranged in a certain included angle therebetween, and furthermore the laser beam which is reflected by the second reflecting surface of the triangle wave reflectoris incident to the spectroscope. Partial laser beam is reflected by the spectroscope and the light reflector and is incident to one refractor and is refracted and incident to a photoelectric detector, and the other partial laser beam is transmitted through the spectroscope and is incident into the other refractor for refraction and incidence into the photoelectric detector. According to the displacement sensor, through arranging the refractors, the measuring precision of the displacement sensor can be improved.

Description

technical field [0001] The invention relates to the technical field of measurement, in particular to a novel displacement sensor with a refracting mirror and a measurement method thereof. Background technique [0002] The new principle of displacement measurement based on the optical triangular amplification method is realized on the basis of the optical triangular amplification method, combined with triangular wave optical devices and high-precision PSD (Position Sensitive Device, position sensitive (sensitive) detector). The triangular wave optical device subdivides the linear displacement into equal intervals, reduces the processing accuracy and size requirements of optical devices, and at the same time reduces the size requirements of high-precision PSD, and realizes high-precision displacement measurement in a small range. However, the displacement sensor in the prior art, for example, the application number is 201810481651.5, and the name is the displacement sensor pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白康学亮
Owner BEIFANG UNIV OF NATITIES
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