Processing technology of surface acoustic filter, and surface acoustic filter

A technology of surface acoustic filter and processing technology, applied in metal processing equipment, manufacturing tools, welding equipment, etc., can solve the problems of high price and difficult to reduce the cost of surface acoustic filter, so as to improve production efficiency and reduce spraying flux. As well as the work of flux cleaning, the effect of reducing production costs

Inactive Publication Date: 2019-04-19
GREAT TEAM BACKEND FOUNDRY (DONGGUAN) LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, the traditional manufacturing process of SAW is to use gold as the solder material to realize the electrical connection between the chip and the substrate. As a rare metal, gold is expensive, so it is difficult to reduce the cost of SAW.

Method used

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  • Processing technology of surface acoustic filter, and surface acoustic filter
  • Processing technology of surface acoustic filter, and surface acoustic filter
  • Processing technology of surface acoustic filter, and surface acoustic filter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Such as figure 1 As shown, the present embodiment provides a surface acoustic filter processing technology, in which chips are installed on the substrate in a flip-chip manner, and solder balls are used as soldering materials in the flip-chip process, and the The tin balls are soldered to the substrate.

[0035] Compared with the traditional use of gold as the soldering material, the use of tin balls as the soldering material can greatly reduce the material cost of the surface acoustic filter, while ensuring that the performance will not be affected, and the welding through the laser thermal bonding process can make the temperature at 10 The high temperature reaches 260°C in nanoseconds. Such a high-speed welding process leads to the completion of soldering without oxidation of the solder balls. Therefore, soldering can be achieved without using flux, and the work of spraying flux and flux cleaning is reduced in the process. , simplify the process, improve production e...

Embodiment 2

[0045] Such as figure 1 As shown, the present embodiment provides a surface acoustic filter processing technology, in which chips are installed on the substrate in a flip-chip manner, and solder balls are used as soldering materials in the flip-chip process, and the The tin balls are soldered to the substrate. The solder balls are connected to the chip by laser thermal bonding.

[0046] Specifically, the surface acoustic filter processing technology described in this embodiment includes the following steps:

[0047] Step S1, providing a chip, providing a chip with a functional area;

[0048] Step S2, planting balls, planting solder balls on the chip, and welding the solder balls to the chip by means of laser thermal bonding;

[0049]Step S3, providing a substrate, providing a substrate with a circuit pattern, and the substrate has a chip mounting area;

[0050] Step S4, soldering the chip, mounting the chip on the chip mounting area in a flip-chip manner, and soldering and...

Embodiment 3

[0054] Such as figure 1 , 2 , 2A, the present embodiment provides a surface acoustic filter processing technology, the chip 100 is arranged on the substrate 200 in a flip-chip manner, and the solder ball 400 is used as the soldering material in the flip-chip process, and the laser thermal bonding The solder ball 400 is connected to the substrate 200 by soldering.

[0055] Preferably, the solder balls 400 are connected to the chip 100 by laser thermal bonding.

[0056] The processing technology of the surface acoustic filter specifically includes the following steps:

[0057] Step S1, providing a chip 100, providing a chip 100 with a functional area;

[0058] Step S2, planting balls, planting solder balls 400 on the chip 100, and welding the solder balls 400 to the chip 100 by means of laser thermal bonding;

[0059] Step S3, providing a substrate 200, providing a substrate 200 with a circuit pattern, and the substrate 200 has a mounting area for the chip 100;

[0060] Ste...

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Abstract

The invention discloses a processing technology of a surface acoustic filter. A chip is arranged on a substrate in an inverted mode; a solder ball is adopted as a welding material in the inversion process; and the solder ball is in welded connection with the substrate in a laser terminal bonding mode. Compared with a traditional technology which adopts gold as the welding material, the processingtechnology has the advantages that the solder ball is adopted as the welding material, so that the material cost of the surface acoustic filter can be greatly reduced, and meanwhile it is guaranteed that the use performance is not affected; and the temperature can reach 260 DEG C within 10 ns after the welding is carried out through the laser thermal bonding process, and the welding is completed before the solder ball is not oxidized by the high-speed welding process, so that the welding can be realized without the use of a soldering flux, the work of spraying the soldering flux and cleaning the soldering flux is reduced in technological process, the technological process is simplified, the production efficiency is improved, and the production cost is further reduced.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a surface acoustic filter processing technology and a surface acoustic filter formed by processing the method. Background technique [0002] The surface acoustic wave filter is based on piezoelectric crystals such as quartz, lithium niobate or brazed lead titanate. After surface polishing, a metal film is evaporated on it, and two sets of energy conversion functions are made by photolithography. The metal electrodes of the interdigital type are called the input IDT and the output IDT respectively. When the input interdigital transducer is connected with an AC voltage signal, the surface of the piezoelectric crystal substrate vibrates, and a sound wave with the same frequency as the external signal is excited, and the sound wave is mainly along the surface of the substrate and the interdigital electrode. The rising direction propagates, so it is called surface acoustic filter. The s...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): H03H9/02B23K1/005B23K35/26
CPCH03H9/02B23K1/0056B23K35/262
Inventor王琇如
OwnerGREAT TEAM BACKEND FOUNDRY (DONGGUAN) LTD