A high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment

A high-pressure gas and detection method technology, applied in measuring devices, instruments, scientific instruments, etc., can solve the problems of inaccurate results and large calculation errors, and achieve the effect of improving volume concentration, improving accuracy, and ensuring accuracy

Active Publication Date: 2021-07-13
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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  • Application Information

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Problems solved by technology

If the given standard sample gas concentration itself has a large deviation, then the calculation error will be greater, resulting in inaccurate final results

Method used

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  • A high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment
  • A high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment
  • A high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment

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Embodiment Construction

[0029] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0030] This embodiment provides a high-pressure gas trace component detection device based on the principle of adsorption enrichment, such as figure 1 As shown, the device includes a high pressure gas source 1, a trim valve, a slow filling chamber 3, a vacuum gauge, a high vacuum valve, a heater 6, an adsorption chamber 7, an adsorbent 9, a mass spectrometry chamber 11, a quadrupole mass spectrometer 13, a high Composition of vacuum pump, rough vacuum pump, rough vacuum valve and pipeline, such as figure 1 shown.

[0031] The high-pressure gas source 1 is used to provide the measured high-pressure gas. The main component should be inert gas, and the trace components should be H2, H2O, N2, O2 and other active gases.

[0032] The fine-tuning valve includes fine-tuning valve I2 and fine-tuning valve II10. The fine-tuning valve I2 is used to introduce the me...

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Abstract

The invention discloses a high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment. The detection device includes a high-pressure gas source, a slow-fill chamber, an adsorption component, a mass spectrometry analysis unit, and a vacuum pump component; the vacuum pump component is used to maintain the slow-charge The pressure required by the chamber, adsorption assembly and mass spectrometry analysis unit is connected to the slow filling chamber, adsorption assembly and mass spectrometry analysis unit through pipelines; After depressurization to normal pressure, it enters the adsorption component. Based on the principle of adsorption and enrichment, the adsorption component absorbs the trace active gas in the high-pressure gas to be measured and releases it again; the released trace active gas enters the mass spectrometry unit, and the obtained Measure the concentration of different trace active gases in high-pressure gas. The detection method of the invention does not need to prepare standard sample gas, and can realize accurate detection of trace active gas content.

Description

technical field [0001] The invention relates to the field of vacuum technology, in particular to a high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment. Background technique [0002] At present, the method of detecting trace gases is generally to analyze by preparing sample gases with different ratios. However, the preparation process and human factors are greatly affected. When the mass spectrometer analyzes the trace gas components in the mass spectrometer chamber, in order to calculate the partial pressures of the main gases, it is necessary to analyze the relationship between the observed peaks and the gases. If the given standard sample gas concentration itself has a large deviation, then the calculation error will be greater, resulting in inaccurate final results. Secondly, when detecting high-pressure gas, the high-pressure gas cannot directly enter the mass spectrometry chamber for analysis, and the high-p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/62
Inventor 李得天丁栋赵澜孙雯君陈联张瑞芳管保国孙冬花
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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