A high-pressure gas trace component detection device and method based on the principle of adsorption and enrichment
A high-pressure gas and detection method technology, applied in measuring devices, instruments, scientific instruments, etc., can solve the problems of inaccurate results and large calculation errors, and achieve the effect of improving volume concentration, improving accuracy, and ensuring accuracy
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[0029] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0030] This embodiment provides a high-pressure gas trace component detection device based on the principle of adsorption enrichment, such as figure 1 As shown, the device includes a high pressure gas source 1, a trim valve, a slow filling chamber 3, a vacuum gauge, a high vacuum valve, a heater 6, an adsorption chamber 7, an adsorbent 9, a mass spectrometry chamber 11, a quadrupole mass spectrometer 13, a high Composition of vacuum pump, rough vacuum pump, rough vacuum valve and pipeline, such as figure 1 shown.
[0031] The high-pressure gas source 1 is used to provide the measured high-pressure gas. The main component should be inert gas, and the trace components should be H2, H2O, N2, O2 and other active gases.
[0032] The fine-tuning valve includes fine-tuning valve I2 and fine-tuning valve II10. The fine-tuning valve I2 is used to introduce the me...
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