A kind of loading measuring device and method of tiny force

A technology of measuring device and measuring method, which is applied in the direction of measuring device, using stable tension/pressure testing material strength, instruments, etc., can solve problems such as different mechanical loading and electrical loading, and achieve the effect of expanding the scope of application

Active Publication Date: 2020-08-25
UNIV OF SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] In view of this, the present invention provides a small force loading measurement device and method to solve the problem of different simultaneous mechanical loading and electrical loading in the prior art

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  • A kind of loading measuring device and method of tiny force
  • A kind of loading measuring device and method of tiny force
  • A kind of loading measuring device and method of tiny force

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Embodiment Construction

[0064] The above is the core idea of ​​the present invention. In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention Description, obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0065] The embodiment of the present invention provides a small force loading measurement device, such as figure 1 As shown, it includes a piezoelectric component 10 , a moving component 11 , a first loading module 12 , a second loadi...

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Abstract

The invention provides a micro-force loading measurement device and method. The device comprises a piezoelectric assembly, a moving assembly, a first loading module, a second loading module, a first measurement module and a processing module, wherein the first loading module is used to apply a mechanical force to the moving assembly through deformation of the piezoelectric assembly and drive the moving assembly to move by the mechanical force; the second loading module is used to apply an electrostatic force to the moving assembly and drive the moving assembly to move by the electrostatic force; the first measurement module is used to measure the displacement amount of the moving assembly; and the processing module is used to obtain the size of the force of the moving assembly according tothe displacement amount of the moving assembly. The force comprises the mechanical force, the electrostatic force and an adhesion force, and thus, coupling measurement of mechanical loading and electrical loading is realized.

Description

technical field [0001] The invention relates to the technical field of micro-nano measurement, and more specifically, relates to a micro-force loading measurement device and method. Background technique [0002] With the continuous development of precision instrument technology, scientific research and industry have put forward higher requirements for the characterization of the mechanical behavior of materials under small mechanical force and small electrostatic force. Due to the small size of the micro-nano sample and the corresponding range of force values, it is difficult to load and measure the tiny mechanical force and electrostatic force of the micro-nano sample. [0003] Among them, the loading of small force mainly includes mechanical loading and electrical loading. For conductive samples, it is often necessary to measure the mechanical properties and electrical properties of the sample at the same time, that is, to measure the mechanical force and electrostatic for...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N3/00G01N3/08
CPCG01N3/00G01N3/08G01N2203/0019G01N2203/0032G01N2203/0051G01N2203/0075
Inventor 赵旸杨晓晨王涛
Owner UNIV OF SCI & TECH OF CHINA
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