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Microfilter and mems sensor components

A technology of micro-filters and sensor components, applied in the direction of sensor parts, sensors, electrical components, etc., can solve problems such as difficulty in reducing wrinkles, harsh requirements on stress control of dust-proof filter membranes, etc.

Active Publication Date: 2020-12-08
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Recently, micro-particulate filters with doubly support beam or fully clamped diaphragm structures have been developed, but this makes the requirements for stress control of the dust-proof filter membrane more stringent, and makes it difficult to operate in any Difficult to reduce wrinkles at any temperature

Method used

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  • Microfilter and mems sensor components

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Embodiment Construction

[0022] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. It should be noted that relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present disclosure unless specifically stated otherwise.

[0023] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended as any limitation of the disclosure, its application or uses.

[0024] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the description.

[0025] In all examples shown and discussed herein, any specific values ​​should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodimen...

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Abstract

A first aspect of the present disclosure discloses a microfilter comprising a carrier (201) and a filter membrane (102). The carrier (201) has a through cavity (205) formed therein penetrating in its thickness direction. The filter membrane (102) is stacked on the carrier (201). The filter membrane (102) comprises a first part (104) covering an opening of the through cavity (205) and a second part (106) not covering said opening, the first part (104) being surrounded by the second part (106). Through-holes (207) are arranged on the first part (104), and the second part (106) engages the carrier (201). The first part (104) is connected to the second part (106) only by a single beam (108), whereby the first part (104) is suspended from the through cavity (205). The second aspect of the present disclosure also provides a MEMS sensor assembly.

Description

technical field [0001] The present disclosure mainly relates to a micro-filter, which may be a micro-filter suitable for acoustic equipment, for filtering dust, particles and / or water and other substances that are not expected to enter the interior of the acoustic equipment. The present disclosure also relates to a MEMS sensor assembly. Background technique [0002] Portable computing devices such as laptops and tablets are commonplace today, as are portable communication devices such as smartphones. However, the internal space left for microphones or speakers in such devices is very limited. As a result, microphones and speakers are getting smaller and more compact. Furthermore, since microphones and speakers are deployed in compact portable devices, they usually need to be close to the associated acoustic input or output ports of the device, making them prone to failure of the MEMS sensors therein due to particle and water ingress. [0003] In the prior art, particle fi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R1/02H04R9/02
CPCH04R1/02H04R1/028H04R9/02
Inventor 畠山庸平林育菁
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD
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