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Diamond growth online monitoring method and diamond synthesis equipment

A diamond and equipment technology, applied in the field of diamond synthesis, can solve the problem of diamond without any technical inspiration, and achieve the effect of prolonging the effective growth time, saving time, and avoiding ineffective production

Inactive Publication Date: 2020-03-27
CHANGSHA ADVANCED MATERIALS IND RES INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is no technical inspiration for how to use this laser for real-time monitoring of diamond growth (such as growth quality and internal stress, etc.)

Method used

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  • Diamond growth online monitoring method and diamond synthesis equipment
  • Diamond growth online monitoring method and diamond synthesis equipment
  • Diamond growth online monitoring method and diamond synthesis equipment

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Embodiment Construction

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0041]It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the accompanying drawings). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.

[0042] In addition, in th...

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Abstract

The invention discloses a diamond growth online monitoring method and diamond synthesis equipment. The diamond growth online monitoring method comprises following steps: step one, starting an MPCVD facility to synthesize diamonds; step two, collecting the monitoring data of growing diamonds by using a monitoring device; step three, sending the monitoring data collected in the step two to a controlcenter by the monitoring device; step four, comparing the monitoring data with a preset data range by the control center, if the monitoring data is in the preset data range, making the MPCVD facilitykeep on working and the diamonds keep on growing, if the monitoring data is not in the preset data range, stopping introducing a carbon source into the MPCVD facility, adjusting the technical parameters of the MPCVD facility, carrying out etching, and then introducing a carbon source into the MPCVD facility again; and step five, repeating step two to step four until the growth of diamonds finishes. The provided method and equipment can monitor the growth of diamonds in real time and can be applied to the technical field of diamond synthesis.

Description

technical field [0001] The invention relates to the technical field of diamond synthesis, in particular to an online monitoring method for diamond growth and diamond synthesis equipment. Background technique [0002] Diamond has attracted everyone's attention due to its excellent physical and chemical properties. However, natural diamond reserves are limited, so people have developed a variety of synthetic diamond methods, such as high temperature and high pressure (HPHT), hot wire chemical vapor deposition (HJCVD). Among them, microwave plasma chemical vapor deposition method (Microwave plasma chemical vapor deposition) synthetic diamond method can synthesize high-quality, large-area diamond because there is no introduction of impurities. [0003] The quality of diamond synthesized by MPCVD is related to many factors, including carbon source concentration, gas flow rate, gas flow ratio, substrate table height, microwave power, and synthesis temperature. The synthesis tempe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J3/06G01N21/65
CPCB01J3/06G01N21/65B01J2203/0655B01J2203/068
Inventor 彭国令黄翀
Owner CHANGSHA ADVANCED MATERIALS IND RES INST CO LTD
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