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Automatic astigmatism eliminating electronic gun and automatic astigmatism eliminating method of electronic gun

A technology of eliminating astigmatism and electron gun, applied in the direction of cathode ray/electron beam tube electron gun, electrode device and related components, cathode ray tube/electron beam tube, etc. good condition, etc.

Pending Publication Date: 2020-07-31
GUILIN THD TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] What the present invention aims to solve is the problem that the effect of the existing astigmatism elimination device is relatively random, and it is difficult to reach the optimal state. It provides an automatic astigmatism elimination electron gun and an electron gun automatic astigmatism elimination method

Method used

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  • Automatic astigmatism eliminating electronic gun and automatic astigmatism eliminating method of electronic gun
  • Automatic astigmatism eliminating electronic gun and automatic astigmatism eliminating method of electronic gun
  • Automatic astigmatism eliminating electronic gun and automatic astigmatism eliminating method of electronic gun

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Embodiment Construction

[0052] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in combination with specific examples and with reference to the accompanying drawings. It should be noted that the directional terms mentioned in the examples, such as "upper", "lower", "middle", "left", "right", "front", "rear", etc., are only referring to the directions of the drawings. Therefore, the directions used are only for illustration and are not intended to limit the protection scope of the present invention.

[0053] see figure 1 , an automatic astigmatism-eliminating electron gun, mainly composed of a central controller 1, an electron source power supply 2, a driving power supply 3, a signal processing circuit 4, an electron beam generator 5, an astigmatism-eliminating device 6, a focusing device 7 and a detection device 8 .

[0054] Electron beam generator 5: the cathode power supply heats the ca...

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Abstract

The invention discloses an automatic astigmatism eliminating electronic gun and an automatic anastigmatism method of an electron gun, which adopt a split Rogowski coil as a detection element and combine a pulsed electron beam technology to realize the non-contact detection of the spot morphology of an electron beam. The split Rogowski coil outputs differential mode signals and takes the minimum value of detection signals as a correction target of the astigmatism elimination device, so that the processing mode of the detection signals is simplified, the influence of common-mode interference signals is eliminated, and the detection sensitivity and precision are improved. And the exciting current of the optimal astigmatism eliminating device is searched for in a split-axis mode, and rapid searching is achieved. The weighted value of the amplitude and the average value of the detection signal can fully reflect the difference of the electron beam spot morphology, the weighted value comprehensive data is used as the judgment basis, the optimal value is searched and confirmed for two rounds, the reliability is further improved, and the randomness is further reduced.

Description

technical field [0001] The invention relates to the technical field of electron beam processing equipment, in particular to an automatic astigmatism elimination electron gun and an automatic astigmatism elimination method for the electron gun. Background technique [0002] The electron beam of the electron beam processing equipment is inconsistent with the focus of the electron beam in all directions on the working plane due to machining errors that cause the electron beam to be out of axis with the lens, the material of the pole shoe to be uneven, the edge effect of the electrode or magnetic pole, and the pollution charge, etc. , the circular electron beam spot cannot be formed, that is, astigmatism is produced. In the electron gun, the astigmatism elimination device is used to correct the shape of the electron beam spot. At present, the correction is performed with a small electron beam, and the best state of the correction is judged by human experience through optical obs...

Claims

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Application Information

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IPC IPC(8): H01J29/48H01J29/56
CPCH01J29/485H01J29/566H01J2229/48H01J37/3007H01J37/153H01J2237/1532H01J37/304H01J2237/30472B33Y30/00H01J29/48
Inventor 黄小东韦寿祺费翔张彤苏乃波王斌董阳郭文明梁祖明黄国华唐强
Owner GUILIN THD TECH CO LTD
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