Equipment for coupling clamping and suction of micro device and machining method thereof
A technology of micro-devices and equipment, applied in the coupling of optical waveguides, instruments, chucks, etc., can solve the problems of inconvenient reclaiming operation of optical devices, poor reclaiming transfer stability, low yield rate, etc., and achieve good coupling stability. performance and accuracy, good installation convenience, and the effect of improving operational efficiency
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Embodiment 1
[0046] Specifically, such as Figure 11 , Figure 12 As shown, the product 6 includes a base member 60 on which four workpieces 631 arranged side by side are arranged, and a light emitter 61 is arranged on one side of the workpieces 631 .
[0047] Such as Figure 1~Figure 13 As shown, a device for clamping and absorbing coupling of micro-devices includes a frame, an operation table is arranged on the frame, a jig assembly 2 is arranged on the operation table, and a base part 60 is arranged on the jig assembly 2; The periphery of the component 2 is provided with a dispensing component 1 , a coupling component 3 and an alignment component 4 corresponding to the jig component 2 respectively.
[0048] Specifically, such as figure 1 , Figure 3~Figure 5 As shown, the jig assembly 2 includes a driving base 20 arranged on the operating table, the driving base 20 is provided with a positioning area for positioning the product jig 23, and a jig clamp 25 capable of relatively openin...
Embodiment 2
[0053] A processing method for a micro-device clamping and suction coupling device: a product 6 includes a base 60, on which four workpieces 631 are arranged side by side, and a light emitter 61 is arranged on one side of the workpiece 631.
[0054] Step 1, feeding, placing the base part 60 of the product 6 on the product jig 23;
[0055] Step 2, the workpiece 631 is loaded, and the workpiece 631 is picked up through the cooperation of the electric gripper 39 of the coupling assembly 3 and the suction nozzle 311;
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