Soaking, spraying and etching method and equipment

A technology of spray etching and equipment, which is applied in the engineering field of graphene substrate etching, and can solve problems such as slow mixing of liquid medicine, difference in specific gravity of liquid medicine components, uneven flow of liquid medicine, etc.

Active Publication Date: 2020-11-24
WUXI GRAPHENE FILM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the production of graphene film adopts the method of vertical immersion etching. Multiple products are placed in the jig at the same time, and then the metal substrate is etched in the tank with only internal circulation and single outlet flow. Unevenness, the mixing of the added potion and the potion in the tank is slow, and the proportion of the potion components in the tank will be different from top to bottom, resulting in differences in the etching rate of copper foil, and different product resistance values
[0003] Due to the instability of product resistance caused by etching copper foil, subsequent products will encounter various problems, such as infrared yield, etc.
In this regard, it is necessary to optimize the process of etching the metal substrate so that the etching rate of the copper foil in the etching tank is uniform. The problem of slowness and the difference in specific gravity of potion components

Method used

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  • Soaking, spraying and etching method and equipment
  • Soaking, spraying and etching method and equipment
  • Soaking, spraying and etching method and equipment

Examples

Experimental program
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Effect test

Embodiment 1

[0107] This embodiment prepares immersion spray etching equipment, such as figure 1 , figure 2 and image 3As shown, it includes: an etching device 1, a liquid distribution device 2, a liquid outlet pipe 3 and a liquid replenishment pipe 4, and the etching device 1 includes an etching tank 11, an upper shower 12, a support plate 13, a lower shower 14 and Roller 15, liquid distribution device 2 includes liquid distribution tank 21, adding port 22, conductivity meter 23, hydrometer 24, hydrogen peroxide detection device 25 and agitator 26, liquid outlet pipe 3 communicates with the bottom of etching tank 11 and liquid distribution tank The bottom of 21 is used for the liquid medicine to flow from the bottom of the etching tank 11 to the bottom of the liquid distribution tank 21, and the liquid replenishment pipe 4 is connected to the etching device 1 and the liquid distribution device 2, and is used for the liquid medicine to flow from the liquid distribution device 2 to the e...

Embodiment 4

[0118] This embodiment prepares immersion spray etching equipment, such as figure 1 , figure 2 and image 3 As shown, it includes: an etching device 1, a liquid distribution device 2, a liquid outlet pipe 3 and a liquid replenishment pipe 4, and the etching device 1 includes an etching tank 11, an upper shower 12, a support plate 13, a lower shower 14 and Roller 15, liquid distribution device 2 includes liquid distribution tank 21, adding port 22, conductivity meter 23, hydrometer 24, hydrogen peroxide detection device 25 and agitator 26, liquid outlet pipe 3 communicates with the bottom of etching tank 11 and liquid distribution tank The bottom of 21 is used for the liquid medicine to flow from the bottom of the etching tank 11 to the bottom of the liquid distribution tank 21, and the liquid replenishment pipe 4 is connected to the etching device 1 and the liquid distribution device 2, and is used for the liquid medicine to flow from the liquid distribution device 2 to the ...

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Abstract

The invention provides a soaking, spraying and etching method and soaking, spraying and etching equipment. The soaking, spraying and etching method comprises the following steps: firstly, covering onesurface, with a graphene film needing to be reserved, of a substrate on which graphene grows with a layer of protective film; and then adding the substrate into a flowing etching liquid medicine to etch the substrate to form the protective film / graphene. The soaking, spraying and etching equipment comprises an etching device, a liquid preparation device, a liquid outlet pipe and a liquid supplementing pipe, the etching device comprises an etching tank, the liquid preparation device comprises a liquid preparation tank, the liquid outlet pipe communicates with the bottom of the etching tank andthe bottom of the liquid preparation tank and used for enabling liquid medicine to flow to the bottom of the liquid preparation tank from the bottom of the etching tank, and the liquid supplementingpipe communicates with the etching device and the liquid preparation device and used for enabling the liquid medicine to flow to the etching device from the liquid preparation device. According to themethod and the equipment provided by the invention, the etching rate of the substrate can be balanced, and the uniformity and the yield of graphene sheet resistance are ensured.

Description

technical field [0001] The invention belongs to the engineering field of graphene substrate etching, and relates to a process method for optimizing and improving etching metal substrates. Background technique [0002] At present, the production of graphene film adopts the method of vertical immersion etching. Multiple products are placed in the jig at the same time, and then the metal substrate is etched in the tank with only internal circulation and single outlet flow. Inhomogeneity, the mixing of the added liquid medicine and the liquid medicine in the tank is slow, and the proportion of the liquid medicine components in the tank will be different from top to bottom, resulting in differences in the etching rate of copper foil and different resistance values ​​of products. [0003] Due to the instability of product resistance during the process of etching copper foil, subsequent products will encounter various problems, such as infrared yield. In this regard, it is necessa...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): C01B32/186C23F1/18
CPCC01B32/186C23F1/18
Inventor李涛刘海滨茅丹张娟娟
OwnerWUXI GRAPHENE FILM