Thermopile infrared detector and preparation method thereof

Abstract

The invention relates to the technical field of infrared detection, and discloses a thermopile infrared detector and a preparation method thereof. The detector comprises a silicon substrate, a first supporting layer and an absorbing material supporting layer which are sequentially arranged from bottom to top, wherein a plurality of thermocouple strips are arranged on the absorbing material supporting layer, the thermocouple strips are arranged in a double-row mode in a shape like a Chinese character 'fei' to form a thermocouple strip area, a passivation heat absorption layer is deposited on the thermocouple strips and extends downwards to the upper surface of the absorbing material supporting layer, and the edge of the thermocouple strip area is not covered with the passivation heat absorption layer; the outer sides of the thermocouple strips in the first row and the tail row are respectively provided with a heat insulation groove parallel to the thermocouple strips, and the heat insulation grooves extend downwards from the absorbing material supporting layer and penetrate through the first supporting layer; and a U-shaped platinum resistor is arranged on the passivation heat absorption layer, and two arms of the platinum resistor are perpendicular to the thermocouple strips and are respectively positioned above the inner ends of the two columns of thermocouple strips, so thatthe responsivity of the infrared detector is improved.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to a thermopile infrared detector and a preparation method thereof. Background technique [0002] Infrared detection technology has extensive and important applications in military and civilian fields. The core of infrared detection technology is the infrared detector. Thermopile infrared detectors are an important type of infrared detectors. They work according to the Seebeck effect principle. Due to their advantages such as uncooled operation at room temperature, wide spectral response range, no need for chopping, low cost, and simple output circuits, they have become One of the current research hotspots in the field of infrared technology. [0003] At present, the traditional thermopile infrared detector based on the four-terminal beam structure has a low duty cycle, and the average temperature difference needs to be improved. The optimized new thermopile infrared de...

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Problems solved by technology

[0005] In order to solve the problem that the temperature difference of the thermopile infrared detector is too small and the response is low in the prior art, the present invention overcomes the shortcomings of the prior art and provides a thermopile infrared detector and its preparation method

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