Efficient crystalline silicon solar cell and preparation method thereof

A technology of solar cells and crystalline silicon, applied in the field of solar cells, can solve the problems that the hydrogen content of solar cells should not be too high, attenuation, etc.

Active Publication Date: 2021-04-02
山东力诺阳光电力科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the hydrogen content in solar cells should not be too high. Under certain temperature and light, the hydrogen will be released at a faster rate, resulting in attenuation.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] A preparation method for high-efficiency crystalline silicon solar cells, the preparation method comprising the steps of:

[0032] (1) Pre-treatment of silicon wafers: put the clean silicon wafers in a carbonitriding furnace, and then introduce a mixed gas of methane and ammonia after vacuuming. The temperature is 900°C, the time is 180min, and the flow rate of methane is 0.9m 3 / h, the flow rate of ammonia gas is 0.6m 3 / h, the carbon potential is 1.0%;

[0033] (2) Texturing: After the silicon wafer is cooled, use a texturing liquid to make texturing on the surface of the silicon wafer at 12°C. The texturing liquid includes the following raw materials in weight percentage:

[0034] 3% sodium hydroxide, 0.2% sodium dodecylbenzenesulfonate, 8% isopropanol, and the balance is water;

[0035] (3) Diffusion: Use a diffusion furnace to perform high-temperature phosphorus diffusion on silicon wafers, form a P-N junction on the surface of the silicon wafer, and use phosphor...

Embodiment 2

[0041] A preparation method for high-efficiency crystalline silicon solar cells, the preparation method comprising the steps of:

[0042] (1) Pre-treatment of silicon wafers: put the clean silicon wafers in a carbonitriding furnace, and then inject a mixed gas of methane and ammonia after vacuuming. The temperature is 1100°C, the time is 150min, and the flow rate of methane is 1.0m 3 / h, the flow rate of ammonia gas is 0.75m 3 / h, the carbon potential is 1.2%;

[0043] (2) Texturing: After the silicon wafer is cooled, use a texturing liquid to make texturing on the surface of the silicon wafer at 10°C. The texturing liquid includes the following raw materials in weight percentage:

[0044] 3% sodium hydroxide, 0.2% sodium dodecylbenzenesulfonate, 8% isopropanol, and the balance is water;

[0045] (3) Diffusion: use a diffusion furnace to perform high-temperature phosphorus diffusion on silicon wafers, form a P-N junction on the surface of the silicon wafer, and use phosphoru...

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Abstract

The invention relates to the technical field of solar cells, in particular to an efficient crystalline silicon solar cell and a preparation method thereof. The preparation method of the efficient crystalline silicon solar cell comprises the steps that (1), silicon wafer pretreatment is conducted, specifically, a clean silicon wafer is placed in a carbonitriding furnace, mixed gas of methane and ammonia gas is introduced after vacuumizing is conducted, the temperature ranges from 800 DEG C to 1200 DEG C, and the time ranges from 30 min to 240 min, wherein the flow rate of methane is 0.8-1.0 m<3> / h, the flow rate of ammonia gas is 0.5-0.75 m<3> / h, and the carbon potential is 0.9%-1.2%; (2), texturing is carried out; (3), diffusion is carried out; (4), etching is carried out; (5), passivationis carried out; (6), silk-screen printing is carried out; and (7), annealing and sintering are carried out. According to the method, the silicon wafer is pretreated, so that the stability of hydrogendiffused into the silicon wafer from the SiNx: H film is enhanced, and the release amount of hydrogen at a certain temperature and under certain illumination is reduced.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a high-efficiency crystalline silicon solar cell and a preparation method thereof. Background technique [0002] With the continuous advancement of industrialization and the improvement of people's living standards, people's demand for energy is increasing. Traditional fossil energy reserves such as oil and coal are limited. Green renewable energy that can replace traditional fossil energy has gradually entered the field of vision of researchers. , solar energy has received great attention as an inexhaustible clean energy. At present, the research on solar energy is mainly concentrated in the fields of photothermal utilization, photoelectric utilization and photochemical utilization. [0003] Solar cells are a major way of photovoltaic utilization of solar energy. The basic principle is to use the photovoltaic effect to directly convert solar radiation energy into electrical...

Claims

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Application Information

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IPC IPC(8): H01L31/0216H01L31/068H01L31/18
CPCH01L31/02167H01L31/1804H01L31/1868H01L31/1864H01L31/068Y02P70/50
Inventor任现坤杨晓君仲伟佳葛永见曹振郭瑞静陈冲
Owner山东力诺阳光电力科技有限公司