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A vacuum coating unshielded sample flipping device

A vacuum coating and flipping device technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems that the film deposition cannot be completed, and there cannot be any shielding

Active Publication Date: 2022-06-17
ANHUI UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Regardless of the above-mentioned overturning device, in order to fix the sample, a certain position must be reserved on the surface of the sample as a fixture fixing position, which cannot complete the film deposition
If the sample has a secondary processing opportunity, the fixed position will not affect the function, but in many cases, the sample no longer has a processing opportunity, and requires coating on both sides without any occlusion

Method used

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  • A vacuum coating unshielded sample flipping device
  • A vacuum coating unshielded sample flipping device
  • A vacuum coating unshielded sample flipping device

Examples

Experimental program
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Embodiment Construction

[0030] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and provides detailed implementation modes and specific operation processes, but the protection scope of the present invention is not limited to the following implementations example.

[0031] like Figures 1 to 7 As shown, this embodiment provides a technical solution: an unobstructed sample inversion device for vacuum coating, including two parts that are symmetrical up and down (see figure 1 ),

[0032] Each part includes a sample stage 1, a sample fixing base 2, a base-fixing telescopic rod assembly (3, 13 and 14), a telescopic rod limit cylinder 15, a telescopic rod secondary drive wheel 7, a driving wheel brake 8, and a telescopic rod The primary drive wheel 6, the splint assembly 5, the splint assembly power transmission shaft 12, the telescopic rod assembly fixing rod 10, the rotating seat 26 ...

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Abstract

The invention discloses a vacuum coating unshielded sample flipping device, which belongs to the technical field of vacuum coating, and comprises a symmetrical upper part and a lower part. Position cylinder, telescopic rod driving assembly, rotating base, base driving assembly, support limit assembly, the sample holding table is set on the sample fixing base, and it is clamped or loosened by the sample fixing base, and the sample The fixed base is connected to one end of the telescopic rod assembly, and the other end is arranged inside the telescopic rod limiting cylinder, the telescopic rod limiting cylinder is connected to the rotating seat, and the telescopic rod driving assembly drives the telescopic rod Components scale. The present invention does not use any fixture in the sample flipping process, but presses the upper and lower parts of the device against each other, and then completes the flipping of the sample without any shielding of the sample surface.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to an unobstructed sample turning device for vacuum coating. Background technique [0002] At present, the most commonly used method for changing the position of the sample is to transmit a rotating force through the magnetic fluid, and the rotating force drives the workpiece holder to rotate, thereby also driving the sample loaded on the workpiece holder to rotate. By properly setting the workpiece holder, it can complete the rotation like a planet. This type of device is suitable for coating the workpiece from the side. [0003] During the coating process, if coating from bottom to top, or from top to bottom, the coating can only be completed on the side of the sample facing the evaporation source or target source, and the other side will be blocked. In response to this phenomenon, the currently disclosed sample inversion method is to invert the entire turntable on which ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50
CPCC23C14/50
Inventor 赵栋才郑军王启明刘兴光张浩洋张子扬
Owner ANHUI UNIVERSITY OF TECHNOLOGY
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