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Vacuum coating shielding-free sample turnover device

A vacuum coating and flipping device technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems that there cannot be any shielding, and the film deposition cannot be completed.

Active Publication Date: 2021-10-01
ANHUI UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Regardless of the above-mentioned overturning device, in order to fix the sample, a certain position must be reserved on the surface of the sample as a fixture fixing position, which cannot complete the film deposition
If the sample has a secondary processing opportunity, the fixed position will not affect the function, but in many cases, the sample no longer has a processing opportunity, and requires coating on both sides without any occlusion

Method used

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  • Vacuum coating shielding-free sample turnover device
  • Vacuum coating shielding-free sample turnover device
  • Vacuum coating shielding-free sample turnover device

Examples

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Embodiment Construction

[0030] The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.

[0031] like Figure 1-7 As shown, this embodiment provides a technical solution: a vacuum coating unshielded sample flipping device, including two parts that are symmetrical up and down (see figure 1 ),

[0032] Each part includes sample storage table 1, sample fixing base 2, base fixing telescopic rod assembly (3, 13 and 14), telescopic rod limiter 15, telescopic rod secondary driving wheel 7, driving wheel brake 8, telescopic rod Primary driving wheel 6, splint assembly 5, splint assembly power transmission shaft 12, telescopic rod assembly fixed rod 10, swivel base 26 and swivel base 28, rotary drive gear 11, ...

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Abstract

The invention discloses a vacuum coating shielding-free sample turnover device, and belongs to the technical field of vacuum coating. The vacuum coating shielding-free sample turnover device comprises an upper part and a lower part which are vertically symmetrical, and each of the upper part and the lower part comprises a sample storage table, a sample fixing base, a telescopic rod assembly, a telescopic rod limiting cylinder, a telescopic rod driving assembly, a rotating seat, a base driving assembly and a supporting limiting assembly; the sample storage table is arranged on the sample fixing base, the sample fixing base clamps or loosens the sample storage table, the sample fixing base is connected with one end of the telescopic rod assembly, the other end of the telescopic rod assembly is arranged in the telescopic rod limiting cylinder, the telescopic rod limiting cylinder is connected with the rotating seat, and the telescopic rod driving assembly drives the telescopic rod assembly to stretch out and draw back. In the overturning process of a sample, no clamp is adopted, the upper part and the lower part of the device are mutually pressed, then the overturning of the sample is completed, and the surface of the sample is not shielded at all.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating non-shielding sample flipping device. Background technique [0002] At present, the most commonly used method to change the position of the sample is to transmit a rotating force through the magnetic fluid, and the rotating force drives the rotation of the workpiece holder, thereby also driving the rotation of the sample loaded on the workpiece holder. By properly setting the workpiece holder, a planetary rotation can be achieved. This type of device is suitable for coating the workpiece from the side. [0003] During the coating process, if the coating is performed from the bottom up or from the top down, only the side of the sample facing the evaporation source or the target source can be coated, and the other side will be blocked. In response to this phenomenon, the currently disclosed sample inversion method is to invert the entire turntable on which...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50
CPCC23C14/50
Inventor 赵栋才郑军王启明刘兴光张浩洋张子扬
Owner ANHUI UNIVERSITY OF TECHNOLOGY
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