Filter fixing structure and filtering device
A fixed structure and filter device technology, applied in the direction of filter separation, grinding/polishing safety devices, chemical instruments and methods, etc., can solve the problems of increasing the difficulty of replacing filters, foreign matter entering grinding equipment, etc.
Pending Publication Date: 2022-06-03
CHANGXIN MEMORY TECH INC
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Problems solved by technology
[0003] Since the filter needs to be replaced regularly, the filter is usually fixed on the mounting frame in the form of clamping. However, during the process of installation and disassembly, the clamping connection requires back and forth friction between the filter and the mounting frame. This will not only increase the difficulty of changing the filter, but also cause foreign matter generated during the friction process to enter the grinding equipment
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[0041] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0042] References in this specification to "one embodiment" or "some embodiments" and the like mean that a particular feature, structure or characteristic described in connection with the embodiment is included in one or more embodiments of the invention. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in other embodiments," etc. in various places in this specification are not nece...
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The invention relates to the technical field of semiconductor manufacturing, and discloses a filter fixing structure and a filtering device.The filter fixing structure comprises a support and a connecting piece, the support is internally provided with a containing space, the two opposite sides of the containing space are provided with a connecting hole and a mounting hole, and the mounting hole and the connecting hole are both communicated with the containing space; the mounting hole can be used for mounting a filter interface, so that at least one part of the filter interface is positioned in the accommodating space; one end of the connecting piece can extend into the accommodating space from the connecting hole, and the connecting piece can be connected to the bracket in a manner of moving up and down relative to the bracket, so that the end surface, facing the mounting hole, of the connecting piece is propped against the end surface of the filter interface or is separated from the end surface of the filter interface; and a circulation channel communicated with the filter interface is arranged in the connecting piece. According to the filter fixing structure, the filter can be conveniently replaced, and the risk of liquid leakage can be reduced.
Description
technical field [0001] The present application relates to the technical field of semiconductor manufacturing, and in particular, to a filter fixing structure and a filter device. Background technique [0002] Chemical mechanical polishing is to polish the surface of the wafer through chemical and mechanical action with the aid of the polishing liquid. At present, in different production processes, filters with different filtration diameters need to be set up to filter larger agglomerated particles in the grinding fluid, so as to ensure the stability of the grinding fluid speed and scratch index, thereby reducing product abnormalities. [0003] Since the filter needs to be replaced regularly, the filter is usually fixed on the mounting frame in the form of snap connection. However, during the process of installation and removal, the snap connection method requires back and forth friction between the filter and the mounting frame. This not only makes it more difficult to repl...
Claims
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IPC IPC(8): B01D35/30H01L21/304B24B55/03
CPCB01D35/306H01L21/304B24B55/03
Inventor 胡继祥古进忠
Owner CHANGXIN MEMORY TECH INC