Display substrate, manufacturing method, display device, detection method and detection device
A display substrate and display area technology, which is applied in the direction of static indicators, semiconductor/solid-state device manufacturing, instruments, etc., can solve the problems that the encapsulation layer of the OLED substrate is prone to failure, etc., so as to improve the overall reliability, prevent display abnormalities, and widely The effect of applying the foreground
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[0072] In order to illustrate the present invention more clearly, the present invention will be further described below with reference to the embodiments and accompanying drawings. Similar parts in the figures are denoted by the same reference numerals. Those skilled in the art should understand that the content specifically described below is illustrative rather than restrictive, and should not limit the protection scope of the present invention.
[0073] In related technologies, such as figure 1 As shown, the encapsulation layer of the display substrate mostly adopts the stacked structure of inorganic layer and organic layer, which is realized by plasma-enhanced chemical vapor deposition (PECVD), sputtering process (SUPTTER), atomic layer deposition (ALD) and other methods. The preparation of the inorganic layer of the encapsulation layer, the inorganic layer is used to block the invasion of water and oxygen from the outside. Due to the large stress in the inorganic layer,...
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