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Evaporation crucible and evaporation device

A crucible and evaporation technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problem of inability to heat different evaporation materials, etc.

Pending Publication Date: 2022-07-15
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of this, the application provides an evaporation crucible and an evaporation device to solve the problem that the evaporation device in the prior art cannot simultaneously heat different evaporation materials at the same evaporation consumption rate

Method used

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  • Evaporation crucible and evaporation device
  • Evaporation crucible and evaporation device

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Embodiment Construction

[0048] In order to better understand the technical solutions of the present application, the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0049] It should be clear that the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0050] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. As used in the embodiments of this application and the appended claims, the singular forms "a," "the," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise.

[0051] It should be unders...

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Abstract

The invention relates to the technical field of evaporation equipment, and provides an evaporation crucible and an evaporation device.The evaporation crucible comprises a crucible body and a heating device; the crucible body is provided with a plurality of containing cavities used for containing evaporation materials, and an opening is formed in the top of each containing cavity. The heating device is arranged outside the crucible body and can heat all the containing cavities respectively. Wherein the accommodating cavities share one opening. Compared with a barrel-shaped evaporation crucible in a point evaporation process in the prior art, the evaporation crucible provided by the embodiment of the invention can enable different types of evaporation materials to perform simultaneous evaporation on a base material at the same heating consumption rate, so that the evaporation quality of the different evaporation materials during simultaneous evaporation is improved.

Description

technical field [0001] The present application relates to the technical field of evaporation equipment, and in particular, to an evaporation crucible and an evaporation device. Background technique [0002] In the OLED panel preparation process, the evaporation process is a very important key process. In the evaporation process, a mask plate is used to cover the base material first, and the evaporation material is heated and volatilized in an evaporation crucible and evaporated onto the corresponding base material from the opening of the mask plate. [0003] At present, the commonly used evaporation process is point evaporation, and for point evaporation, the evaporation equipment generally includes a small barrel-shaped evaporation crucible, and the metal evaporation material is heated into a gaseous state in the evaporation crucible. The opening of the barrel-shaped evaporation crucible diffuses and escapes upward in a conical shape to evaporate the substrate. [0004] H...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243
Inventor 林文晶轩景泉赵军崔建勇
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD