Medium-resistant pressure sensor for large pressure range
A pressure sensor and sensor technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through mechanical components, instruments, etc., can solve problems such as resistance problems
Pending Publication Date: 2022-07-29
INFINEON TECH AG
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Media other than hydrogen can also cause problems with the el
Method used
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example 1
[0080] Example 1 is a pressure sensor comprising: a housing; a flexible membrane forming a sealed cavity with the housing; a sensor element disposed in the cavity; and a gaseous medium located in the cavity.
example 2
[0081] Example 2 is the pressure sensor of example 1, wherein the gaseous medium is air.
example 3
[0082] Example 3 is the pressure sensor of example 2, wherein the air is at atmospheric pressure, or at positive or negative pressure.
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Abstract
Embodiments of the present disclosure relate to media resistant pressure sensors for large pressure ranges. A pressure sensor (10; 20; 30), comprising a housing (11), a flexible membrane (12) forming a sealed cavity (13) together with the housing (11), a sensor element (14) arranged in the cavity (13), and a gaseous medium (15) located in the cavity (13).
Description
technical field [0001] The present disclosure relates to a pressure sensor and its use for measuring pressure. Background technique [0002] Fuel cells are becoming increasingly important in electric vehicles. The hydrogen required for its operation must be stored and transported under high pressure (up to 700 bar or more). The infrastructure required to provide this includes configurations for hydrogen production from local generators to distribution through hydrogen refueling stations. It is very important to use pressure sensors in hydrogen tanks, piping connections, etc. Pressure sensors are also increasingly used in other fields and associated with other media, especially over a wide pressure range. [0003] In particular, the high pressure and chemical nature of hydrogen present a particular challenge for pressure sensors. On the one hand, it is important to accurately measure low to medium and high pressures of 700 bar or more in hydrogen tanks etc. possible. Hy...
Claims
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IPC IPC(8): G01L19/14
CPCG01L19/141G01L19/148G01L19/0038G01L19/0645G01L19/0084G01L19/142G01L7/082G01L19/0061
Inventor R·M·沙勒T·米勒B·温克勒
Owner INFINEON TECH AG
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