Liquid droplet discharging method, and liquid droplet discharging apparatus and liquid for manufacturing substrate
A liquid droplet and substrate technology, which is applied to the device for coating liquid on the surface, printed circuit manufacturing, instruments, etc., can solve the problem of prolonging the processing time of the substrate
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[0048] figure 1 It is a perspective view showing the configuration of a droplet discharge device according to an embodiment of the present invention.
[0049] Such as figure 1 As shown, the droplet discharge apparatus 1 has a control device 2 , a discharge head group 3 , and a mounting table 4 as main components.
[0050] In the droplet ejection device 1 thus constituted, by controlling the operations of the ejection head group 3 and the mounting table 4 by the control device 2, liquid droplets are ejected onto the substrate 5 mounted on the mounting table 4, and 5 to form a prescribed pattern.
[0051] Next, each constituent element will be described.
[0052] In the following description, let the arrangement direction of the ejection head group 3 be the X direction, the transport direction of the substrate 5 be the Y direction, and the in-plane rotation direction in the XY plane be the θ direction.
[0053] The ejection head group 3 is composed of a plurality of ejection...
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