Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus

US20110303361A1Inactive Publication Date: 2011-12-15TOHOKU UNIV +1
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  • Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus
  • Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus
  • Outside Air Shut-Off Container and Pressure-Reducible Processing Apparatus

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first embodiment

[0024]Referring to FIG. 1, a pressure-reducible processing apparatus according to the present invention is formed by, for example, a plasma processing apparatus having an outside air shut-off container 10 as illustrated. The illustrated outside air shut-off container 10 has a process chamber 12 that defines a processing space therein, a cover member 14 mounted on the process chamber 12, and a hermetically sealing mechanism portion 16 for hermetically sealing the process chamber 12 and the cover member 14. The illustrated process chamber 12 has a cylindrical shape. The process chamber 12 and the cover member 14 are made of aluminum or stainless steel.

[0025]The process chamber 12 has an upper end extending outward along its circumference so as to form a chamber protrusion, or a flange portion 12a. The cover member 14 has a lower end extending outward from its sidewall so as to form a cover member protrusion 14a.

[0026]A gas inlet is formed in the flange portion 12a of the illustrated ...

second embodiment

[0035]An outside air shut-off container according to the present invention will be described below with reference to FIG. 3, which shows part of FIG. 1 in an enlarged manner. In FIG. 3, the flange portion 12a of the process chamber 12 and the cover member protrusion 14a of the cover member 14 are formed of high-purity aluminum (S2M). Aluminum oxide layers 121 and 141 are provided at least in surface areas of the flange portion 12a and the cover member protrusion 14a of the cover member 14 with which the O-ring 22 is brought into contact.

[0036]Thus, with the aluminum oxide layers provided on the flange portion 12a and the cover member protrusion 14a, which are made of aluminum, the temperature at which pyrolysis takes place in the atmosphere (1% H2O / 20% O2 / Ar) can be increased to 150° C. or more. Therefore, degradation of the O-ring 22 due to pyrolysis can be prevented even though the O-ring 22 is heated to a high temperature.

[0037]An anodizing process using a nonaqueous solvent can ...

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Abstract

Because an O-ring of synthetic resin is pyrolyzed in the atmosphere at a high temperature of 150° C. or more, the airtightness cannot be maintained. In an outside air shut-off container according to the present invention, an inert gas is supplied between an O-ring, which hermetically seals a process chamber and a cover member, and the outside air while a gas passage formed between the O-ring and the outside air is covered with a sealing cover. Additionally, an aluminum oxide layer is formed on a contact surface of the O-ring to increase the pyrolysis temperature of the O-ring.

Description

[0001]This application is based upon and claims the benefit of priority from Japanese patent application No. 2010-132329, filed on Jun. 9, 2010, the disclosure of which is incorporated herein in its entirety by reference.BACKGROUND[0002]1. Field of the Invention[0003]The present invention relates to an outside air shut-off container and a pressure-reducible processing apparatus having a hermetically sealing mechanism.[0004]2. Description of the Related Art[0005]Generally, a pressure-reducible processing apparatus such as a plasma processing apparatus has an outside air shut-off container including a process chamber that houses a substrate to be processed or the like and a cover member mounted on the process chamber. The pressure-reducible processing apparatus conducts plasma processing or the like in a state in which the outside air shut-off container has been decompressed.[0006]Some pressure-reducible processing apparatuses have a hermetically sealing mechanism provided between a p...

Claims

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Application Information

Patent Timeline
15 Dec 2011
Publication
US20110303361A1
IPC
C23F1/00; B65D51/00
CPC
H01J37/32513; C23C16/4409
Inventors
OHMI; SHIRAI, YASUYUKI