Double diaphragm precision throttling valve

a technology of throttling valve and diaphragm, which is applied in the direction of diaphragm valve, engine diaphragm, operating means/releasing devices of valves, etc. it can solve the problems of small cracks and crevasses, o-rings other materials that may not be compatible with process fluid, etc., to avoid backlash or create excessive noise or wear during operation, reduce backlash, and minimize backlash
USRE42401E1Inactive Publication Date: 2011-05-31ENTEGRIS INC
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Patents(United States)
Current Assignee / Owner
ENTEGRIS INC
Publication Date
2011-05-31
Estimated Expiration
Not applicable · inactive patent

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Abstract

A throttling valve assembly actuated by a stepper motor having a double diaphragm seal and integral throttling surface. The throttling surface interfaces to a mating orifice and port arrangement to provide a smooth control regime for various process fluids. Because of the unique design of the flow paths, the fluids will remain in a laminar flow state throughout the throttling range, thus providing smooth and continuous response to the control input. The valve opening to the fluid is controlled by a stepper motor through a direct drive mechanism. The embodiment shown here employeesemploys all PTFE construction for the wetting parts, but any material could be used that would be compatible with the process fluid. Additional features are minimal capture of the process fluid, free draining, and no metallic parts in close communication with the process fluid.
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Description

FIELD OF INVENTION

[0001] The present invention relates to fluid control devices and in particular to those applications where materials of construction must be compatible with the process fluids and where it is a requirement that minimal volumes of fluids are captured within the valve. Often times the only suitable material meeting these requirements will be PTFE or other Teflon types. Furthermore, these applications often require that no cracks or crevices are present to permanently capture fluids or particulate carried by the fluid. Another requirement where slurries are being controlled is that the fluid should not be subjected to high rates of shear. Lastly, these fluids are often highly toxic and a double containment is necessary for any thin walled barrier in contact with the fluid.BACKGROUND OF INVENTION

[0002] Many forms of throttling valve are found within the field. Viraraghavan describes a valve in patent '530(cited in the references) that that is typical of valves that may,...

Claims

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