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345 results about "Reverse effect" patented technology

Guideless stage with isolated reaction stage

A guideless stage for aligning a wafer in a microlithography system is disclosed, and a reaction frame is disclosed which isolates both external vibrations as well as vibrations caused by reaction forces from an object stage. In the guideless stage an object stage is disclosed for movement in at least two directions and two separate and independently movable followers move and follow the object stage and cooperating linear force actuators are mounted on the object stage and the followers for positioning the object stage in the first and second directions. The reaction frame is mounted on a base structure independent of the base for the object stage so that the object stage is supported in space independent of the reaction frame. At least one follower is disclosed having a pair of arms which are respectively movable in a pair of parallel planes with the center of gravity of the object stage therebetween. The linear positioning forces of the actuator drive means are mounted and controlled so that the vector sum of the moments of force at the center of gravity of the object stage due to the positioning forces of the drive means is substantially equal to zero. The actuator mounting means can include at least two thin flexible members mounted in series with the primary direction of flex of the members being orthogonal to one another.
Owner:NIKON CORP

Mechanical joints for subsea equipment

A mechanical connector for oil and gas well apparatus applies a predetermined preload across the connection, the preload being adapted to accommodate relatively large dimensional tolerances in the loadpath of the connector preload by placing a component with a low modulus of elasticity within that load path. In one embodiment, the connector comprises fingers (3) of a pair of pipe flanges (1, 1′), a stationary retainer ring (14) against which a finger reaction surface (13) is pressed, a runner ring (15) located outside the fingers and movable lengthwise along the fingers by an actuator (16), the retainer ring and the runner ring having an elasticity that is so large that deviations in their elongation only have a small influence on the retainer ring and the runner ring radial pressure against the fingers and clamping forces of the fingers against the flanges. In a second embodiment, the connector comprises dogs (103, FIG. 4) located around the circumference of a first tubular joint component, a follower located outside the dogs (103) and movable axially of the dogs, the low elastic modulus component being a ring located in the loadpath below the dogs. In a third embodiment, the connector comprises a lockdown mechanism acting between nested components, the low elastic modulus component being an insert comprising a load shoulder transferring loads between the nested components.
Owner:FMC TECH INC
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