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Raster optical modulator with translational reflective mirror and array thereof

A technology of light modulator and mirror, applied in the direction of diffraction grating, instrument, optics, etc., can solve the problems of complex DMD process, difficulty in integration, and low effective diffraction area of ​​GLV, so as to improve optical diffraction efficiency, reduce gap, The effect of solving the problem of optical diffraction

Inactive Publication Date: 2007-11-14
CHONGQING UNIV
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Problems solved by technology

[0012] Aiming at many problems existing in the prior art, and overcoming the disadvantages of complex DMD process and the low effective diffraction area of ​​GLV, which is difficult to be integrated into an area array, the purpose of the present invention is to provide a mirror translational grating light modulator and array , expand the effective area of ​​the device, realize the array structure of the light modulator, obtain the mirror translation type grating light modulator system, improve the optical diffraction efficiency of the device, and simplify the processing technology of the device

Method used

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  • Raster optical modulator with translational reflective mirror and array thereof
  • Raster optical modulator with translational reflective mirror and array thereof
  • Raster optical modulator with translational reflective mirror and array thereof

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Embodiment Construction

[0038] Referring to Fig. 1, the structure of a single pixel of the reflector translational grating light modulator includes a fixed grating 1, a reflective surface 2, a support beam 3, an insulating layer 4, a substrate 5, an electrode layer 6, a movable plate 7, and a drive circuit 8. Its production method is as follows: first deposit a layer of silicon oxide on the substrate 5 by using peroxidation technology to form an insulating layer 4, which plays an insulating role; the electrode layer 6 composed of polysilicon material is deposited on this oxide to form an insulating layer 4. into; Utilize sacrificial layer technology, make support beam 3 and movable plate 7; Form capacitive pole plate between support beam 3 and electrode layer 6, the optional material of support beam 3 is many, the present invention adopts silicon nitride plating In the way of double-layer structure of aluminum, single-layer structure of polycrystalline silicon can also be used as the material. The m...

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Abstract

A light modulator consists of base, insulation layer, electrode layer, movable flat plate, fixed grating, and cover. It is featured as locating flat plate in the first plane to concentrate light intensity on zero class of diffraction as on voltage and locating it in the second plane to concentrate light intensity on top class of diffraction by driving it to move vertically with voltage in order to realize various modulation for incoming beam for providing different energy distribution of diffraction light.

Description

technical field [0001] The present invention relates to a light beam modulation device, in particular, the present invention relates to a reflector translational grating light modulator and array, which realizes different modulations of light beams based on a movable plate and a fixed grating, so as to provide different The distribution of diffracted light energy meets the requirements of projection display systems. Background of the invention [0002] The prior art has disclosed a variety of optical modulators based on MEMS technology that can be used alone or together with other modulators, and these modulators include digital micromirror devices (DMDs) and grating light valves (GLVs). [0003] Among these devices, digital micromirror devices (DMDs) and grating light valves (GLVs) are represented, and their commercial applications have achieved great success. DMD is a modulator composed of millions of deflectable reflective micromirrors manufactured by MEMS technology. T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/02G02B5/18G02B26/00
Inventor 黄尚廉伍艺张洁张智海付红桥闫许
Owner CHONGQING UNIV
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