Manufacturing method for reflection mirror of silicon-based LCD device
A silicon-based liquid crystal and reflective mirror technology, which is applied in the photographic process of the patterned surface, static indicators, semiconductor/solid-state device manufacturing, etc., can solve problems such as aluminum consumption, affecting the quality of the reflective mirror surface, and metal layer depressions. The effect of quality improvement
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[0022] Liquid crystal on silicon (LCOS) is a new type of reflective liquid crystal display device. Unlike ordinary liquid crystals, LCOS combines CMOS technology to directly realize the driving circuit on the silicon wafer, and uses CMOS technology to make the active pixel matrix on the silicon substrate. On the bottom, it has the characteristics of small size and high resolution. In the present invention, an aluminum oxide layer is added on the surface of the metal layer, or an aluminum oxide layer and a silicon oxide layer are added simultaneously. The probability of electrochemical reaction occurring in contact with the solution is reduced, so that few depressions are produced on the reflective mirror surface, and the quality of the reflective mirror surface is improved. In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction w...
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