Liquid driven ultra-micro-displacement control device and control method
A control device, a technology of micro displacement, applied in non-electric variable control, position/direction control, control/regulation system and other directions, which can solve problems such as small motion control range
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[0023] Schematic diagram of the structure of the liquid-driven ultra-small displacement control device of the present invention, such as figure 1 As shown; the device is composed of an elastic micro-displacement mechanism 1 and a liquid drive control mechanism 2 connected by a connecting chain 7. The above-mentioned elastic micro-displacement mechanism 1 includes a micro-drive workbench and its clamp 3, an elastic micro-displacement beam 5, a spring 6, and a spring 6 and one end of the elastic micro-displacement beam 5 are respectively fixed on the body 4, and the other end of the spring 6 is connected with the other end of the elastic micro-displacement beam 5, and the workbench and its clamp 3 are installed on the left end of the elastic micro-displacement beam 5, through the elastic The combined action of the micro-displacement beam 5 and the spring 6 causes the workbench 3 to produce a corresponding micro-displacement or to apply a micro-load; the above-mentioned liquid dri...
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