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Method for fabricating holder, method for producing actuator and method for producing slide part

A manufacturing method and retainer technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, maintaining the alignment of the head frame, etc., can solve the problem that the length of the arm is difficult to reach the expected value, etc. question

Inactive Publication Date: 2009-04-01
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, in the actuator using the above-mentioned retainer, if the part extending from the connection part to the tip is used as the arm part among each arm part, it is difficult to achieve the desired length of the arm part.

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  • Method for fabricating holder, method for producing actuator and method for producing slide part
  • Method for fabricating holder, method for producing actuator and method for producing slide part
  • Method for fabricating holder, method for producing actuator and method for producing slide part

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Embodiment Construction

[0033] The preferred embodiments of the present invention will be described in detail below with reference to the drawings. In the following description, in all the drawings, the same or corresponding parts are denoted with the same symbols. In addition, the size ratio in the figure does not correspond to the size in the description.

[0034] Reference Figure 1 ~ Figure 3 The sliding member 1 in this embodiment will be described. figure 1 It is a perspective view of the general structure of the sliding member 1. The sliding member 1 is composed of a magnetic head slider (hereinafter referred to as “slider”) 10 and an actuator 12 that controls the movement of the slider 10.

[0035] The slider 10 has a thin-film magnetic head, and reads magnetically recorded information from the hard disk or records magnetically recorded information on the hard disk. The slider 10 is roughly cubic, and the upper surface in the figure is the air-bearing surface opposite to the hard disk. In additio...

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Abstract

Provided is a manufacturing method of a holding tool by which lengths of a pair of arms can be accurately formed, to provide a manufacturing method of an actuator and to provide a manufacturing method of a slider unit. The manufacturing method of the slider unit 1 comprizes a step for forming a pair of grooves 70 and 71 in opposite positions of both surfaces 61 and 62 of a first substrate 60, a step for joining second and third substrates 80 and 80 to both the surfaces in which the pair of grooves are formed, a step for forming the pair of arms 42 and 42 by etching the first substrate from an end part 60a of the first substrate to the position of the pair of grooves to expose the respective parts of the surfaces on the first substrate side of the second and the third substrates, a step for respectively providing piezo-electric elements 30 and 30 on the surfaces respectively opposite to the first substrate side of the second and the third substrates and a step for attaching a magnetic head slider 10 between the pair of arms.

Description

Technical field [0001] The present invention relates to a method of manufacturing an actuator, a method of manufacturing a sliding member, and a method of manufacturing a retainer suitable for these components. technical background [0002] In the field of magnetic recording in recent years, the recording density of recording media such as hard disks has been continuously increasing at an alarming rate. With the continuous improvement of this recording density, the track pitch is also constantly shrinking, that is, the track density is also rapidly increasing. [0003] If the width of the track pitch becomes smaller, the accuracy of the position control of the head slider (hereinafter referred to as "slider") corresponding to the track position must be improved. However, only relying on traditional voice coil motor (VCM) for control has limited control capabilities. For this reason, it is necessary to control the slider more precisely. [0004] As a device for controlling such a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/22H01L41/09H02N2/00G11B5/596H01L41/313H01L41/338
Inventor 东条裕志
Owner TDK CORPARATION