Method for preparing zinc oxide nano column array field emission component

Abstract

The invention is applicable in the technical field of the preparation of zinc oxide nano columns and provides a two-stage etching method for manufacturing a zinc oxide nano column array field emission component. The method comprises the following steps of: generating a zinc oxide nano column by a hydrothermal method; performing furnace tube annealing on the zinc oxide nano column; performing wet etching on the tip of the zinc oxide nano column by using an acid with relatively low acidity; and performing sputter etching on the tip of the zinc oxide nano column, so that the tip forms an angle, wherein a wet etching parameter can be adjusted to obtain different angles. By adopting the two-stage etching process combining the wet etching and the sputter etching, the tip angle of the zinc oxidenano column can be controlled simply and easily and the field emission property of the vertically aligned zinc oxide nano column array field emission component can be greatly improved, namely, a starting electric field of the zinc oxide nano column array field emission component can be greatly reduced and the field gain coefficient value of the zinc oxide nano column array field emission component can be greatly increased.

Description

technical field [0001] The invention belongs to the technical field of preparation of zinc oxide nanocolumns, and in particular relates to a method for preparing field emission components of zinc oxide nanocolumn arrays. Background technique [0002] The basic principle of the field emission display (Field Emission Display, FED) is to emit electrons to the fluorescent layer of the anode substrate through the cathode discharge of the backlight substrate to excite the phosphor to emit light. It has many advantages such as spontaneous luminescence, high brightness, wide viewing angle, fast response, and wide operating temperature range; and its luminescence principle is close to that of a cathode ray tube (Cathode Ray Tube, CRT), and its display performance is also capable of replacing a cathode ray tube. potential. The development of field emission displays began in 1950, but there is still room for improvement in practical applications. The problems to be solved include impr...

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Problems solved by technology

[0018] The purpose of the embodiments of the present invention is to provide a method for preparing zinc oxide nanocolumn array field emission components, aiming to solve the limitation of zinc oxide nanocarbons by plasma etching in the prior art in the preparation method of zinc oxide nanocolumns The shape of the end of the tube cannot effectively control the tip angle of the zinc oxide carbon nanotubes

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