Method for controlling physical dimension of magnesium oxide sintered target by using temperature gradient

A technology of physical size and temperature gradient, which is applied in the field of magnesium oxide sintered target material preparation, can solve the problems affecting the expansion contact of magnesium oxide particles, uneven driving force, etc.

Inactive Publication Date: 2011-10-19
LIAONING ZHONGDA SUPERCONDUCTING MATERIAL
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Problems solved by technology

[0004] Incomplete volatilization of non-target components will lead to uneven driving force when the sintered magnesium oxide target shrinks; temperature gradient will affect the expansion contact between magnesium oxide particles

Method used

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  • Method for controlling physical dimension of magnesium oxide sintered target by using temperature gradient
  • Method for controlling physical dimension of magnesium oxide sintered target by using temperature gradient

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Embodiment Construction

[0019] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0020] refer to figure 1 , use magnesium oxide powder with a diameter of 0.5 to 1 μm, press it into a diameter of 12mm, a thickness of 6mm, use propanol as a binder, zinc stearate as a release agent, and control the moisture content at about 2.5%.

[0021] (1) Raise to 400°C at a rate of 3°C / min, and keep the temperature constant for 100 minutes;

[0022] (2)

[0023] (3) Raise the temperature to 1500°C at a rate of 4°C / min, and keep the temperature constant for 80 minutes;

[0024] (4) Raise the temperature to 1720°C at a rate of 1°C / min, and keep the temperature constant for 400 minutes.

[0025] After the above 4 heating sections and 4 constant temperature sections, a sintered magnesium oxide target with a diameter of 8mm and a thickness of 6mm can be obtained.

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Abstract

The invention discloses a method for controlling the physical dimension of a magnesium oxide sintered target by using temperature gradient. The method comprises the following four heating processes and four temperature maintaining processes: (1) heating magnesium oxide powdery blank material from room temperature to a temperature of 300 DEG C to 600 DEG C with a heating rate of 2 to 7 DEG C / min, and then maintaining the temperature for 20 to 100 min; (2) heating the material to a temperature of 900 DEG C to 1200 DEG C with a heating rate of 4 to 10 DEG C / min, and then maintaining the temperature for 30 to 120 min; (3) heating the material to a temperature of 1450 DEG C to 1550 DEG C with a heating rate of 3 to 7 DEG C / min, and then maintaining the temperature for 30 to 90 min; (4) heating the material to a temperature of 1700 DEG C to 1800 DEG C with a heating rate of 0.5 to 2 DEG C / min, and then maintaining the temperature for 300 to 500 min.

Description

technical field [0001] The invention belongs to the field of magnesium oxide sintered body target material preparation, and in particular relates to a physical size control method for magnesium oxide sintered body target material. Background technique [0002] At present, the sintered magnesium oxide target is an important raw material for the evaporation protective film of plasma display (PDP). In order to increase the productivity of evaporation, it is necessary to automatically supply samples to the evaporation source one by one. The smaller the physical size of the target, the more timely the erosion in the crucible due to evaporation can be filled; but the smaller the physical size, the easier it is to fly from the crucible and cause splashing due to the impact of electron beam irradiation. [0003] Therefore, the control of the physical size of the sintered magnesium oxide target is a difficult task, and it is necessary to study the control method of the physical size...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/01C04B35/64
Inventor 林宇穆卓艺王宁会潘忠艺张百平
Owner LIAONING ZHONGDA SUPERCONDUCTING MATERIAL
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