Inductively coupled plasma mass spectrometry method

A technology of inductive coupling and testing methods, applied in measuring devices, material analysis through electromagnetic means, instruments, etc., can solve problems such as inability to effectively eliminate polyatomic ion interference, cumbersome operations, complicated mechanisms, etc., and achieve strong practical application significance , Simple method, easy to operate effect

Inactive Publication Date: 2011-12-14
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this mechanism is complex and cannot effectively eliminate polyatomic ion interference, and the operation is cumbersome

Method used

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  • Inductively coupled plasma mass spectrometry method
  • Inductively coupled plasma mass spectrometry method
  • Inductively coupled plasma mass spectrometry method

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Embodiment Construction

[0017] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0018] figure 2 A flow chart of an inductively coupled plasma mass spectrometry testing method according to an embodiment of the present invention is schematically shown.

[0019] combine figure 1 and figure 2 , the inductively coupled plasma mass spectrometry test method according to the embodiment of the present invention can be used to test the concentration of the ion to be measured in the solution to be tested, for example, in the current specific embodiment, it is used to detect phosphorus (P) in dilute hydrofluoric acid DHF ion.

[0020] The inductively coupled plasma mass spectrometry testing method according to the embodiment of the present invention comprises:

[0021] The polyatomic ion to be measured is combined step S1, in the...

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Abstract

The invention provides an inductively coupled plasma mass spectrometry and data analysis method. The inductively coupled plasma mass spectrometry and data analysis method is used for testing the concentration of ions to be tested, and comprises the following steps of: selecting polyatomic ions which are formed by combining the ions to be tested with other elements, instead of the ions to be tested, as test objects; manufacturing a standard curve by a standard addition method instead of an external standard method so as to eliminate other interference; and for the test of a standard product, also selecting the polyatomic ions as the test objects so as to process final data.

Description

technical field [0001] The invention relates to the field of trace element testing, more specifically, the invention relates to an inductively coupled plasma mass spectrometry test and a data analysis method. Background technique [0002] Inductively coupled plasma mass spectrometry (ICP-MS) is currently the most sensitive instrument for testing elements. Its main working principle is to use ICP (inductively coupled plasma) to vaporize, atomize and then ionize the aerosolized liquid sample, and then use the mass separation system to separate the ions in turn, and the separated ions hit the electrons respectively. The multiplier outputs an electronic signal, and the concentration of the element in the sample can be known by comparing the signal intensity with that of the standard substance. [0003] Among them, the mass separation system separates according to the mass-to-charge ratio of ions, so there will be a kind of polyatomic ion interference. For example, to test phos...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/64
Inventor 吴显欣徐泱金郁张震鲁亭矞陈昉颢闵张斌傅蓓芬
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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