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Correction method for device dismatch of resistor

A technology of resistors and devices, applied in the field of mismatch correction of semiconductor devices, can solve problems such as lack of mismatch models of resistor devices

Active Publication Date: 2012-03-21
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Device mismatch models for resistors are currently missing in SPICE software

Method used

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  • Correction method for device dismatch of resistor
  • Correction method for device dismatch of resistor
  • Correction method for device dismatch of resistor

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Embodiment Construction

[0018] The correction method of the device mismatch of the resistance of the present invention is:

[0019] First of all, there are 4 process mismatch parameters to determine the resistance, which are the square resistance RS, the terminal resistance REND, the offset ΔW of the resistance width, and the resistance value R. The reason why these four parameters are used as the process mismatch parameters of the resistor is that there is a physical meaning expressed by the following formula between these four parameters:

[0020] This is formula 0. Among them, W represents the width of the resistor, and L represents the length of the resistor.

[0021] Secondly, based on the research and analysis of device mismatch data of a large number of resistors, it is found that the random deviations of the above four parameters are inversely proportional to the resistor width W and resistor length L, and proportional to the distance D between resistors, thus obtaining Random error for e...

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Abstract

The invention discloses a corrosion method for device dismatch of a resistor. The procedure is that: firstly defining the number of the technological dismatch parameters as four, namely a square resistance parameter, a terminal resistance parameter, a resistor width offset parameter and a resistance value parameter; secondly, setting the random deviation of the four parameters, and thirdly correcting the device dismatch of the resistor. The correction method for device dismatch of the resistor can perform simulation analysis to the device dismatch of the resistor in simulation program with integrated circuit emphasis (SPICE) software, and the influence to the device dismatch of the resistor of resistor width W, resistor length L and device distance D is fully considered.

Description

technical field [0001] The invention relates to a mismatch correction method of a semiconductor device. Background technique [0002] In the process of integrated circuit design and production, due to uncertainty, random error, gradient error and other reasons, some semiconductor devices that are exactly the same in design have deviations after production, which is called mismatch of semiconductor devices. Device mismatch can cause changes in device structural parameters and electrical parameters, which can greatly affect the characteristics of analog circuits. With the development of semiconductor production technology, the size of devices continues to shrink, and device mismatch is mainly caused by random errors, which are usually caused by integrated circuit production processes. [0003] SPICE (Simulation Program with Integrated Circuit Emphasis) is a general-purpose integrated circuit simulation software. Because device mismatch has a great influence on integrated cir...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50
Inventor 周天舒王正楠
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP