Acquiring method and acquiring device for process data and equipment control system

Abstract

The invention provides an acquiring method and an acquiring device for process data and an equipment control system. The method specifically comprises steps that an upper computer acquires process data corresponding to data objects of a lower computer based on a subscription mechanism and a data processing module uses an active reading mechanism to acquire process data corresponding to the data objects of the lower computer. The technical scheme can eliminate effects of data communication between the upper computer and the lower computer on data communication between the data processing module and the lower computer, avoids failure of data communication between the upper computer and the lower computer, and simultaneously improves effectiveness of data communication between the upper computer and the lower computer.

Description

technical field [0001] The invention relates to the technical field of production line equipment control, in particular to a process data acquisition method and device, and an equipment control system. Background technique [0002] With the development of a single process technology, as well as the increasingly complex and systematic degree of the process, the automatic control technology of the process is also applied more widely. [0003] For example, in order to monitor all kinds of data in the semiconductor processing process and analyze the reasons for hardware failures or unqualified products, existing methods have proposed data acquisition functions. The data acquisition here mainly refers to the acquisition of data in the process, that is, Record the values ​​of various parameters in the process, such as pressure, temperature, radio frequency voltage, etc., over time. By analyzing the obtained data, the operator can monitor the status of the production line equipmen...

AI Technical Summary

Problems solved by technology

[0016] However, for the data processing module 104, when reading data, it needs to involve database operations such as connection, opening, and closing; like this, when continuously reading data, it is inevitable to run into the problem of too frequent database operations; at the same time, Due to the problem of database storage capacity, it will inevitably cause data accumulation problems caused by data not being stored in time; these problems will increase the return time, which means that subscribers will not return in time

[0017] Therefore, in the process of reading and writing Data objects based on the subscription mechanism, since the return of the data processing module 104 has a very high probability of exceeding the above-mentioned time constraints, once it occurs, the lower computer 103 will close the communication link, and the communication link Closing will cause the data transmission of all subscribers cannot be realized, that is, neither the upper computer 102 nor the data processing module 104 can perform data transmission with the lower computer 103

For an equipment control system, if the communication between the upper computer 102 and the lower computer 103 fails, it means that the upper computer 102 cannot command and coordinate the work of the lower computer 103, which will cause a series of serious problems such as data loss and machine status instability. serious, impermissible problem

[0018] In short, a technical problem that needs to be urgently solved by those skilled in the art is: how to eliminate the influence of the data communication between the data processing module and the lower computer on the data communication between the upper computer and the lower computer, so as to avoid the conflict between the upper computer 102 and the lower computer 103. communication failure

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