Bipolar high-voltage pulse generation device and corresponding processing system

Abstract

The invention relates to a bipolar high-voltage pulse generation device and the corresponding processing system, belonging to the technical field of high-voltage pulse power. The pulse generation device comprises a high-voltage direct-current power supply, two capacitance discharging units and two sparkle gap switches, wherein the two capacitance discharging units are connected on the two ends of the high-voltage direct-current power supply after connected in series; the two sparkle gap switches are connected with the two capacitance discharging units in parallel after connected in series; the node between the two capacitance discharging units is used for connecting one end of the processing chamber device; the node between the two sparkle gap switches is used for connecting the other end of the processing chamber device; the two sparkle gap switches are provided with driving devices; under the actions of the driving devices, the two sparkle gap switches can turn on and off and close alternately. According to the invention, alternate on and off of the two mechanical rotary sparkle gap switches are utilized to enable the device to output the bipolar high-voltage pulse. The bipolar high-voltage pulse generation device provided by the invention has simple structure and cheap price, and the device can adjust the high-voltage pulse frequency of the output.

Description

technical field [0001] The invention relates to a bipolar high-voltage pulse generating device and a corresponding processing system, belonging to the technical field of high-voltage pulse power. Background technique [0002] Pulse power technology is a new technology that has gradually emerged in recent years. It stores a large amount of energy in the energy storage element, and quickly releases the energy to the load in a very short time through the discharge switch. Due to its unique functions, this technology has been widely used in many fields, such as: wastewater, waste treatment, medical and sanitation, sterilization and disinfection, etc. [0003] High-voltage pulse power supply is an important device in pulse power technology. It not only requires a steep rising edge of the output pulse and a high repetition frequency, but also requires a high output voltage and a long working life. The high-voltage pulse power supply is mainly composed of DC high voltage, energy s...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a bipolar high-voltage pulse generator and a corresponding processing system to solve the problems of complex structure, many components and high price of the current bipolar high-voltage pulse generator

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