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High-sensitivity environmental compensation type capacitive surface stress biosensor

A biosensor and surface stress technology, applied in the field of biosensors, can solve the problems of low signal-to-noise ratio and low sensitivity, and achieve the effects of high accuracy, improved sensitivity, and low noise

Active Publication Date: 2013-04-10
TAIYUAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of low signal-to-noise ratio and low sensitivity of existing surface stress biosensors, the present invention provides a highly sensitive environment compensation capacitive surface stress biosensor

Method used

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Embodiment Construction

[0021] A highly sensitive environment-compensated capacitive surface stress biosensor, comprising a substrate 1; an active support film 2 and a reference support film 3 are respectively fixed on the upper surface of the substrate 1; the inner cavity of the active support film 2 is provided with a first bottom electrode 4 ; The first bottom electrode 4 is attached and fixed on the upper surface of the substrate 1; the outer top surface of the active support film 2 is attached and fixed with the first top electrode 5; the first bottom electrode 4 is directly opposite to the first top electrode 5; refer to The inner cavity of the support film 3 is provided with a second bottom electrode 6; the second bottom electrode 6 is attached and fixed on the upper surface of the substrate 1; a second top electrode 7 is attached and fixed with reference to the outer top surface of the support film 3; The electrode 6 is directly opposite to the second top electrode 7; the outer top surface of ...

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Abstract

The invention relates to a biosensor, and in particular relates to a high-sensitivity environmental compensation type capacitive surface stress biosensor. The problem that the conventional surface stress biosensor has low signal to noise ratio and low sensitivity is solved. The high-sensitivity environmental compensation type capacitive surface stress biosensor comprises a substrate, wherein an active supporting film and a reference supporting film are respectively fixed on the upper surface of the substrate; a first bottom electrode is arranged in the inner cavity of the active supporting film; the first bottom electrode is fixedly attached to the upper surface of the substrate; a first top electrode is fixedly attached to the outer top surface of the active supporting film; the first bottom electrode is dead against the first top electrode; a second bottom electrode is arranged in the inner cavity of the reference supporting film; the second bottom electrode is fixedly attached to the upper surface of the substrate; a second top electrode is fixedly attached to the outer top surface of the reference supporting film; and the second bottom electrode is dead against the second top electrode. The high-sensitivity environmental compensation type capacitive surface stress biosensor is suitable for detection and monitoring of living matters and chemical substances.

Description

technical field [0001] The invention relates to a biosensor, in particular to a high-sensitivity environment compensation capacitive surface stress biosensor. Background technique [0002] Biosensor refers to the use of biological substances (such as enzymes, proteins, DNA, antibodies, antigens, biofilms, microorganisms, cells, etc.) Devices for detection and monitoring of chemical substances. Surface stress biosensor is a kind of biosensor, which is widely used in clinical medical diagnosis, biochemical detection, new drug discovery and other fields. It is mainly used to detect the change of cell surface stress to realize the monitoring of cell health status. With the development of biological MEMS technology, more and more microstructures have been widely used in the field of biochemistry. Therefore, under the current technical conditions, surface stress biosensors are mainly divided into two types according to the structure: micro-cantilever structure surface stress bio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
Inventor 桑胜波张文栋奉辉李朋伟胡杰李刚石强杜少博
Owner TAIYUAN UNIV OF TECH
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