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Inverted figure-eight terahertz wave filter

A figure-of-eight, terahertz technology, applied in the field of terahertz wave filters, can solve problems such as high loss, complex structure, and difficult manufacturing process, and achieve the effects of low insertion loss, easy integration, and excellent narrowband bandpass filter characteristics

Inactive Publication Date: 2014-10-08
CHINA JILIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide an inverted 8-shaped terahertz wave filter with low insertion loss and excellent narrowband bandpass filtering characteristics in order to overcome the shortcomings of the prior art with complex structure, difficult actual manufacturing process, and high loss

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  • Inverted figure-eight terahertz wave filter
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  • Inverted figure-eight terahertz wave filter

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Embodiment 1

[0017] Inverted figure-of-eight terahertz wave filter:

[0018] The material of the substrate is high-resistance silicon with a refractive index of 3.42. The high-resistance silicon substrate has a length of 2000 μm, a width of 1200 μm, and a thickness of 300 μm. The etching width of the inverted 8-shaped groove is 60 μm, and the etching thickness is 100 μm; the outer radius r1 of the upper left half-arc groove is equal to the outer radius r1 of the lower right half-arc groove, both of which are 400 μm; the lower left The outer radius r2 of the side semi-arc groove is equal to the outer radius r2 of the upper right semi-arc groove, both of which are 450 μm. The side length of the equilateral triangular groove is 80 μm, and the etching thickness of the equilateral triangular groove is 100 μm. The number of equilateral triangular grooves in the upper left triangular groove array and the lower right triangular groove array is 19, and the number of equilateral triangular grooves...

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Abstract

The invention discloses an inverted 8-shaped terahertz wave filter. It includes a terahertz wave input terminal, a terahertz wave output terminal, and a high-resistance silicon substrate; the high-resistance silicon substrate is etched with an array of inverted 8-shaped grooves and triangular grooves, and the inverted 8-shaped grooves and triangular groove arrays form a Centrally symmetrical structure, the inverted 8-shaped groove is connected in sequence by the upper left half-arc groove, the left lower half-arc groove, the right upper half-arc groove, and the right lower half-arc groove. The slot array is composed of equilateral triangular grooves, and the equilateral triangular grooves are arranged at equal intervals in the upper left half-arc groove, the lower left half-arc groove, the upper right half-arc groove, and the lower right half-arc groove. inside of the groove. The invention has the advantages of excellent narrow-band band-pass filtering characteristics, low insertion loss, simple and novel structure, small size, easy manufacture and integration, and the like. It meets the requirements for applications in terahertz wave medical imaging, non-destructive detection, terahertz wave communication systems and other fields.

Description

technical field [0001] The present invention relates to a terahertz wave filter, in particular to an inverted 8-shaped terahertz wave filter. Background technique [0002] Terahertz (THz for short) refers to electromagnetic waves with a frequency in the range of 0.1-10THz (1THz=10 12 Hz). This band is between millimeter wave and infrared radiation, and it is the transition zone from macroscopic classical theory to microscopic quantum theory, as well as the transition field from electronics to photonics. Due to the special position of terahertz wave, it has many superior characteristics and very important academic research and application value. In the fields of astrophysics, plasma physics, materials science, biomedical engineering, environmental science and engineering, spectroscopy and imaging technology, information science and technology, terahertz waves have broad and important applications, making countries around the world have been given great attention. Because ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/20
Inventor 李九生
Owner CHINA JILIANG UNIV
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