Method for preparing electrode on single nano wire

Abstract

The invention discloses a method for preparing an electrode on a single nano wire. The method is used for preparing the electrode at a specific position on the nano wire so as to realize electrical contact and is implemented mainly by virtue of micro-nano manufacturing processes such as nano wire transfer, nano wire dispersion, electron beam photoengraving and nesting, and nano film deposition. The method is mainly characterized in that an Al film is used as a conductive layer for electron beam photoengraving, a protective layer of the nano wire, and a undercut layer for a stripping process; and by utilizing the method, the alignment precision of the electrode and the nano wire and the success rate of preparation can be obviously improved. The method can be used for preparing nano wire solar batteries, photoelectric detectors, light-emitting diodes, lasers, sensors and the like.

Description

technical field [0001] The invention relates to frontier research fields such as nano-optoelectronics, micro-nano sensing technology, micro-electronics and micro-nano processing, and the synthesis and preparation of one-dimensional nanomaterials, and specifically relates to a method for preparing electrodes on single nanowires. Background technique [0002] Nanowires are one-dimensional nanostructures whose radial dimension is on the order of nanometers and whose length direction is not limited. As an important nanomaterial, although it has been less than 20 years since its discovery, it has received widespread attention in various fields due to its special properties in biochemistry, mechanics, electromagnetics, and optoelectronics. . In 2001, "Nature" magazine reported that Yang Peidong's group at the University of California, Berkeley had developed the world's smallest room-temperature ultraviolet laser based on ZnO nanowires, which showed good laser performance. In 200...

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