Parallel motion decoupling servo control platform

Abstract

The invention discloses a parallel motion decoupling servo control platform, which comprises a pedestal, a first linear motor, a second linear motor and a motion platform, wherein the motion platform is arranged between the first linear motor and the second linear motor, a first side and a second side of the motion platform are respectively connected with a first motor rotor and a second motor rotor, and are respectively moved along a first horizontal direction and a second horizontal direction under the drive of the first motor rotor and the second motor rotor. According to the parallel motion decoupling servo control platform provided by the embodiment of the invention, by adopting a parallel structure, the parallel motion decoupling servo control platform is simple and symmetrical in structure, motion components in the first horizontal direction and the second horizontal direction can be exchanged so as to be convenient for processing and maintenance, levelness of the motion platform during motion is more easily ensured at work, and an execution result from input of a drive force electric signal to motion of the motion platform is more consistent in each motion direction so as to be beneficial for controlling precision of a track outline of planar motion.

Description

technical field [0001] The present invention relates to the technical field of two-axis linkage decoupling mechanism, and more specifically, relates to a parallel motion decoupling servo control platform. Background technique [0002] At present, the widely used two-axis planar motion platform mostly adopts the transmission mode of rotating motor plus ball screw. In this case, the rotating motor converts the rotating motion into linear motion through the screw, and there is a transmission link, so that there is Non-linear links such as gaps, and the mass of the moving part is large, which limits the performance indicators such as the movement speed, acceleration and control accuracy of the platform. Therefore, the development of high-speed and high-precision motion systems with new driving methods and mechanisms (low friction, high acceleration, and motion decoupling mechanisms) has become an important research content in the fields of laser processing and precision photoele...

AI Technical Summary

Problems solved by technology

However, after our application, we found that it has the following shortcomings: the voice coil motor drive cable moves with the motion platforms at all levels, which interferes with the high-speed trajectory tracking control; the driving quality of the underlying platform is relatively large, and there are inherent deficiencies in the high-speed, high-acceleration trajectory tracking control.

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