Deflection-type recovering-assistant MEMS hanging beam structure
A suspension beam and main beam technology, applied in TV, piezoelectric/electrostrictive/magnetostrictive devices, optics, etc., can solve the problems of MEMS microstructures that cannot be released smoothly, adhered, and devices cannot work.
Inactive Publication Date: 2014-02-05
SOUTHEAST UNIV
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Problems solved by technology
Therefore, MEMS microstructures may not be released smoothly during preparation or may cause adhesion due to some accidental overload during use.
In the face of such problems, the conventional MEMS structure is difficult to solve, causing the device to fail to work
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[0017] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0018] Such as figure 1 and figure 2 As shown, a deflection type recovery-assisted MEMS suspension beam structure of the present invention is characterized in that: the structure includes a substrate 1, an electrostatic pull-down electrode 2, anchor regions 31-38, a suspension main beam 4 and two symmetrically distributed bent support beams. The one bending support beam is composed of crossbeams 5 and longitudinal beams 71-74 arranged in parallel, the other bending support beam is composed of crossbeams 6 and longitudinal beams 81-84, and all the longitudinal beams have the same size; the bending support beams The crossbeams 5 and 6 are respectively connected to the two longitudinal ends of the suspension main beam 4, and the suspension main beam 4 is suspended above the substrate 1 through the anchorage areas and bending support beams ex...
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The invention discloses a deflection-type recovering-assistant MEMS (Micro Electric-Mechanical System) hanging beam structure which comprises a substrate, static pull-down electrodes, anchor areas, a hanging main beam and two bending support beams symmetrically distributed, wherein the bending support beams are connected with the two vertical ends of the hanging main beam respectively, and are formed by longitudinal beams and cross beams, and each group of longitudinal beams adopts a double parallel design; the hanging main beam is hung above the substrate through the anchor areas and the bending support beams. During operation, if the hanging main beam cannot smoothly recover from the 'down' state to the 'up' state due to adhesion, the groups of longitudinal beams in the bending support beams are electrified selectively to enable the longitudinal beams which the electrical current flows through to be heated and generate linear expansion, so that the bending support beams connected to the two ends of the hanging main beam can horizontally move within the same distance in the opposite directions to have deflecting action on the hanging main beam, and the deflecting force can help the hanging main beam to overcome the adhesion from the substrate and recover to the 'up' state.
Description
technical field [0001] The invention relates to the field of reliability processing technology in the process of processing and using a micro-mechanical system (abbreviated as MEMS in the text). Specifically, it relates to a deflection-assisted restoration type MEMS suspension beam structure. Background technique [0002] In recent years, with the increasing maturity of MEMS (Micro Electric-Mechanical System) process, device and system research, the market scale of MEMS products has gradually expanded. Reliability, as a key issue in the process of productization, has attracted more attention from designers and users. [0003] Some basic structures such as beams, membranes or mass blocks are commonly used in MEMS. The surface area of these structures is very large relative to the volume, and the distance from the substrate is very small, only a few microns. Under the action of surface force, it is easy to cause the beam or membrane to deform and adhere to the bending of t...
Claims
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IPC IPC(8): B81B7/02
Inventor 唐洁影王磊黄庆安
Owner SOUTHEAST UNIV