Magnetic field measurement analysis system
An analysis system, a technology for magnetic field measurement, applied in measurement devices, measurement of magnetic variables, instruments, etc., can solve the problems of uneven distribution of magnetic field intensity and difficult measurement, and achieve the effect of fast measurement process, improved uniformity, and accurate measurement results.
Active Publication Date: 2014-03-26
SHANGHAI ZICHUANG COATING TECH
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Problems solved by technology
[0004] In order to solve the defect that the magnetic field intensity distribution is uneven and difficult to measure in the prior art, the present invention provides a magnetic field measurement and analysis system
Method used
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[0017] In order to describe the technical solution of the present invention more clearly, the present invention will be further described below in conjunction with the accompanying drawings.
[0018] refer to figure 1 As shown, a magnetic field measurement and analysis system includes a rack device 1, a longitudinal moving device 3 and a lateral moving device 2 arranged on the upper end of the rack device 1, wherein the longitudinal moving device 3 and the lateral moving device 2 form a "cross" cross type.
[0019] The lateral moving device 2 comprises a first hand wheel 12, a first rack and pinion 15, a horizontal linear guide rail 19, a Hall probe 13 mounted on the lateral guide rail 19, a gear device in the Hall probe 13 and a horizontal linear guide rail 19 Spiral connection, when the horizontal linear guide rail 19 rotates, it can drive the Hall probe 13 to move left and right.
[0020] It is known from the above that when the first handwheel 12 is turned, the first rac...
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The invention relates to a magnetic field measurement analysis device using a hall probe. The magnetic field measurement analysis system comprises a rack device, a transverse moving device mounted on the top end of the rack device, a lengthways moving device mounted on the upper end of the rack device and connected with the transverse moving device in a criss-cross manner, and the hall probe moving leftwards and rightwards along with the transverse moving device and moving upwards and downwards along with the lengthways moving device, wherein the transverse moving device is provided with a transverse calibrated scale; the lengthways moving device is provided with a lengthways calibrated scale; magnetic field measurement is carried out for a surface of a magnet based on different demands by using a fixed point method through the hall effect of the hall probe on a Gaussian instrument; magnetic field strengths of different points are acquired, a curve graph of the magnetic field is drawn through corresponding software, and the magnetic field uniformity of magnetic steel assignment obtained based on the measurement can be used for installation and adjustment of magnetic steel. Therefore, the uniformity of the magnetic field assignment is improved, and the characteristics of fast measurement process, precise measurement result, stability, reliability and the like are achieved.
Description
technical field [0001] The invention relates to a magnetic field measurement and analysis device, in particular to a magnetic field measurement and analysis system through a Hall probe. Background technique [0002] At present, the magnetron sputtering technology used in coated glass, magnetron sputtering has developed into one of the technologies in industrial coating production, in the mass coating production, special attention is paid to target utilization, film uniformity, deposition rate and sputtering process In terms of stability and other issues, in the magnetron sputtering coating equipment, the magnet can only be measured separately. After the magnet is installed, the uniformity of the magnetic field cannot be effectively measured, so the plasma will produce a local shrinkage effect. [0003] The uniformity of film thickness of coated glass is a very important performance index of coated glass, which will directly affect the appearance quality and use effect of the...
Claims
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Inventor 魏庆瑄张俊峰李桂良
Owner SHANGHAI ZICHUANG COATING TECH