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mems with single use valve and method of operation

A cavity and plate technology, applied to valve devices, engine components, mechanical equipment, etc., can solve the problems of comparable manufacturing complexity and cost

Active Publication Date: 2016-02-10
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the size constraints, manufacturing complexity, and expense for single-use valves (i.e., valves that open only once and remain open thereafter) are comparable to those of multi-use valves

Method used

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  • mems with single use valve and method of operation
  • mems with single use valve and method of operation
  • mems with single use valve and method of operation

Examples

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Embodiment Construction

[0027] To promote an understanding of the principles of the invention, reference will now be made to the embodiments illustrated in the drawings and described in the following written description. It should be understood that no limitation of the scope of the invention is thereby intended. It is also to be understood that the invention includes any changes and modifications to the described embodiments, and includes additional applications of the principles of the invention which would normally occur to one skilled in the art to which the invention pertains.

[0028] figure 1 A ready-to-use MEMS device 100 is shown including a substrate 102 , an intermediate support layer 104 and a cover layer 106 . Cover layer 106 defines a cavity 108 above substrate 102 that is sealed by valve assembly 110 . Accordingly, a fluid 112 (which may be a liquid or a gas) is maintained in the chamber 108 .

[0029] Valve assembly 110 includes a heating element 114 , a sacrificial material 116 , ...

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Abstract

In one embodiment, a method of opening access to a cavity comprises: providing a donor portion; forming a heating element adjacent to the donor portion; forming a first sacrificial plate against the donor portion, wherein, The donor portion and the sacrificial plate are a collapsible pair; forming a first cavity, a portion of the first cavity being bounded by the first sacrificial plate; generating heat by a heating element; using the generated heat and the The donor portion is formed of a first reduced volume segment from a first sacrificial segment; and a channel to the first cavity is formed by forming the first reduced volume segment.

Description

technical field [0001] The present invention relates to microelectromechanical systems (MEMS) devices or semiconductor devices. Background technique [0002] Semiconductor substrates are used in various applications. One such use is for forming microelectromechanical systems (MEMS) devices. As the need to increase the complexity of the physical structure of MEMS devices has increased, a number of different forming processes have been developed. The two main classes of forming processes are bulk micromachining and surface micromachining of silicon. Each of these procedures has unique benefits and capabilities. [0003] Typically, the processes used to shape the substrate allow highly complex shapes to be defined in the plane of the substrate. These processes also enable the manufacture of moving parts. One known class of components comprising moving parts are valves. One example of a micromachined valve is a thermally actuated microvalve with a seat substrate fabricated...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K99/00
CPCF16K99/003F16K99/0044
Inventor A·费伊P·陈
Owner ROBERT BOSCH GMBH