Electro-spraying microfluid chip, making method and mask plate equipment

A technology of microfluidic chip and manufacturing method, which is applied in the field of mask plate equipment and electrospray microfluidic chip, can solve the problems such as poor electrospray effect of polymer microfluidic chip, achieve improved stability and ionization effect, and improve The effect of the spray effect

Active Publication Date: 2014-09-24
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem of poor electrospray effect of existing polymer microfluidic chips, the present invention provides an electrosprayed microfluidic chip, manufacturing method and mask plate equipment

Method used

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  • Electro-spraying microfluid chip, making method and mask plate equipment
  • Electro-spraying microfluid chip, making method and mask plate equipment
  • Electro-spraying microfluid chip, making method and mask plate equipment

Examples

Experimental program
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preparation example Construction

[0039] refer to figure 1 , according to the preparation method of the embodiment of the present invention, the chip mold can be made by using a soft photolithography process. The basic process includes: preparing a mask, throwing the photoresist, exposing, developing and forming a mold, pouring the mixed polymer into the mold, curing and peeling , dicing and bonding. figure 1 Among them, ① represents the step of removing glue; ② represents the step of exposure; ③ represents the step of developing; ④ represents the step of polymer injection; ⑤ represents the step of curing and cutting; ⑥ represents the step of bonding. Wherein, steps ①, ②, and ③ can be carried out multiple times as required (to be further described in detail below).

[0040] like figure 2 As shown, two rectangular film masks 201 and 202 can be used, and each mask has a light-transmitting area and an opaque area.

[0041] The two reticles 201 and 202 both have three light-transmitting regions marked with cro...

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Abstract

The invention relates to an electro-spraying microfluid chip, a making method and mask plate equipment. According to the making method, by adopting two mask plates with different transparent structures, through sequentially using two mask plates, different structures can be formed on different photoetching glue depths, and finally a required structure is obtained through development so as to be used as a microfluid chip forming mould, a spraying hole of a microfluid chip can be integrally formed on the microfluid chip, namely, a micro-runner outlet is directly formed into a spraying hole of the microfluid chip. Because the spraying hole can be directly demoulded and formed from a mould formed by a photoetching glue without cutting and finishing; and the obtained microfluid chip is capable of obtaining a good electro-spraying effect, and thus the problem of poor electro-spraying effect of an existing high polymer microfluid chop is effectively solved.

Description

technical field [0001] The invention relates to a microfluidic chip, in particular to an electrospray microfluidic chip, a manufacturing method and mask plate equipment. Background technique [0002] Microfluidic chips, especially integrated microfluidic chips with high-density, large-scale, high-throughput, and multi-functional features, have played an important role in the fields of chemistry and biology. Compared with macro-scale experimental setups, this technique significantly reduces sample consumption and improves reaction efficiency. At the same time, it also reduces the pollution of the waste generated by the experiment to the environment; the parallel advantage of the integrated microfluidic chip operation can realize the high-throughput and automatic control of the experiment; and it can be precisely controlled by micro-structures such as micro-valve and micro-pump. This makes microfluidic chips have irreplaceable advantages in the field of analysis. [0003] Ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01L3/00G03F7/20G03F1/38G03F1/42
Inventor 钱翔徐杰于赐龙刘浪余泉倪凯王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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