A Statistical Modeling Method of Radio Frequency Varactor

Abstract

The statistical modeling method of the radio frequency varactor of the present invention includes: determining all model parameters that need to be extracted for device modeling; classifying the parameters; testing the scattering parameters of the device, establishing a reference model of the device that does not include process fluctuations; obtaining the device The fluctuation characteristics of the scattering parameters on the entire wafer, determine the fluctuation data part; based on the scattering parameters of the fluctuation data part and the network parameters converted from the scattering parameters, construct the index used for statistical modeling of the device; based on the index, calculate The value of each component in the sub-circuit model, and perform sensitivity analysis and sorting of the component value relative to the index value, and select the component with the highest sensitivity; for various parameter groups in the component scalable formula, perform sensitivity analysis of the parameter value to the component value And sorting; select the parameter with the highest sensitivity, fit the statistical characteristic distribution of the device, and obtain the statistical model of the global fluctuation distribution of the device. The modeling process of the present invention is fast and clear.

Description

technical field [0001] The invention relates to the technical field of semiconductor device modeling technology, in particular to a statistical modeling method for radio frequency variable capacitors. Background technique [0002] Varactor (Varactor), as the main capacitance adjustment device, plays a very important role in the design of radio frequency integrated circuits. As the process node decreases, its performance fluctuation caused by the process on the entire wafer becomes more and more significant. At present, there is no public report on the modeling of the statistical characteristics of the radio frequency performance of the varactor. [0003] The radio frequency modeling method of the varactor has not formed a unified standard, which means that the model can adopt different sub-circuit structures, and the components in the circuit can also adopt different scalability (Scalable) formulas. Most of the formulas do not have strict physical meaning, but are based on ...

AI Technical Summary

Problems solved by technology

Most of the formulas do not have strict physical meaning, but are based on mathematical fitting, resulting in model parameters that cannot accurately correspond to device manufacturing process parameters

This makes it difficult to select statistical model parameters for characterizing process fluctuations

[0004] For the processes of different foundries, the reasons for the process fluctuations are different, that is, different statistical distribution characteristics are shown in the test data, and it is difficult to select a unified and fixed standard index for statistical modeling of the varactor

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