Measuring device and method for thrust force of piezoelectric actuator

Abstract

A piezoelectric actuator thrust force measurement device and measurement method, the system includes an external frame, an actuating part arranged in the external frame, a force-sensitive part and a displacement control part arranged in the external frame and sequentially connected to the lower end of the actuating part , the piezoelectric actuator to be tested, the connecting parts of the actuator and the connecting spring, one end of the connecting spring is connected to the external frame, and the adjusting bolt is penetrated from the lower end of the external frame and connected to the connecting spring, which is used to adjust the position and actuation of the connecting spring The first displacement sensor and the second displacement sensor are respectively located outside the outer frame and placed on both sides of the displacement control part and connected to the input end of the controller, and the output end of the controller is connected to the actuating part; the present invention also The measuring method is disclosed; the present invention solves the problem that the thrust force of the current piezoelectric actuator cannot be measured, fills up the blank of measuring technology, and has the characteristics of high measuring precision, good stability and convenient use.

Description

technical field [0001] The invention relates to a measuring device, in particular to a thrust force measuring device and a measuring method of a piezoelectric actuator. Background technique [0002] In recent years, with the rapid development of micro-nano technology, micro-displacement piezoelectric actuators have been widely used in the technical fields of optics, electronics, aviation, aerospace, machinery manufacturing, medicine and genetic engineering. Due to the stiffness of the piezoelectric actuator itself, the output force of the actuator will vary with the output displacement: when the output displacement is 0, the external output force can reach the maximum value. At this time, the force on the actuator (which is numerically equal to the external output force) is called the blocking force (Blocking Force) of the actuator. This force is generally used to measure the ability of the actuator to output force. But there is no measurement system directly used to measur...

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Problems solved by technology

[0003] The purpose of the present invention is to fill the gap in the above-mentioned measurement technology, to provide a piezoelectric actuator thrust force measurement device and measurement method, which solves the problem that the current piezoelectric actuator thrust force cannot be measured, and has the advantages of high measurement precision, stable Good performance and easy to use

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