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Magnetic steel array and maglev planar motor

A magnetic steel array and planar motor technology, which is applied to magnetic circuits, electrical components, electromechanical devices, etc., can solve the problem of low thrust of maglev planar motors, and achieve the effect of increasing the thrust constant

Active Publication Date: 2018-07-20
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention provides a magnetic steel array and a maglev planar motor to solve the problem of low thrust of the maglev planar motor in the prior art

Method used

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  • Magnetic steel array and maglev planar motor
  • Magnetic steel array and maglev planar motor
  • Magnetic steel array and maglev planar motor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Please refer to Figure 4, in this embodiment, the maglev planar motor includes: a motor mover and a motor stator 200, and the motor mover includes: a magnet steel array 100 and a back iron 300 arranged on the magnet steel array 100; the motor stator 200 adopts a PCB The printed circuit board is made, including: the first coil 210 for generating the output force in the X direction and the second coil 220 for generating the output force in the Y direction, the first coil 210 and the second coil 220 are mutually orthogonal and stacked, and the coils An insulator 230 is provided therebetween.

[0050] Please refer to Figure 5 , the magnetic steel array 100 is composed of a one-dimensional Halbach magnetic steel array and a two-dimensional Halbach magnetic steel array 110 . Wherein, the two-dimensional Halbach magnet array 110 has two groups; the one-dimensional Halbach magnet array includes: a first magnet array 120 and a second magnet array 130, wherein the second magn...

Embodiment 2

[0066] The difference between this embodiment and Embodiment 1 lies in the layout of the magnetic steel array.

[0067] Specific as Figure 16 As shown, the magnetic steel array 100' is formed by splicing two two-dimensional Halbach magnetic steel arrays 110' and two one-dimensional Halbach magnetic steel arrays 120'. The two-dimensional Halbach magnet array 110' includes first and second two-dimensional Halbach magnet arrays 110A and 110B. The one-dimensional Halbach magnet array 120' includes first and second one-dimensional Halbach magnet arrays 120A and 120B.

[0068] The relationship between the working mode of the magnetic steel array 100' and the electrification of the coil is as follows: Figure 17 shown.

[0069] The first coil 210'B is energized to excite the first two-dimensional Halbach magnet array 110A and the first one-dimensional Halbach magnet array 120A to generate force in the X direction and the Z direction, and the second coil 220'B is energized to exci...

Embodiment 3

[0073] The difference between this embodiment and Embodiment 1 and Embodiment 2 lies in that, in the motor stator, the coils are connected in different ways.

[0074] Such as Figure 19 As shown, in this embodiment, the magnetic steel array 100" is composed of four one-dimensional Halbach magnetic steel arrays 110". Single magnetic steel array 110" as Figure 20 As shown, it is spliced ​​by N magnets, S magnets and H magnets. The N-S pole distance in the magnetic steel is τ, and the total splicing length of magnets with different polarities is 5τ. The two one-dimensional Halbach magnetic steel arrays 110 ″ arranged in parallel are separated by Df in the X direction / Y direction, and Df satisfies the relationship Df=(N+0.5)τ, where N is an integer greater than or equal to 0.

[0075] Correspondingly, corresponding to the magnetic steel array 100", the wiring method of the coil of the motor stator is as follows Figure 21 As shown, it adopts a wiring method with a phase-to-pha...

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Abstract

Provided are a magnetic array (100) and magnetic suspension planar motor, the magnetic array comprising: one-dimensional Halbach magnetic arrays (120, 130) and two-dimensional Halbach magnetic arrays (110), both forming a square magnetic array, and the two-dimensional Halbach magnetic arrays being respectively disposed on the two ends of a diagonal line in the square magnetic array. The magnetic array employs a combination of one-dimension Halbach magnetic arrays and two-dimension Halbach magnetic arrays, and increases the thrust constant of a magnetic suspension planar motor compared to the magnetic array of the same size employing only one-dimension Halbach magnetic arrays.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a magnetic steel array and a magnetic levitation planar motor. Background technique [0002] In the field of lithography equipment, the motion of the motion table needs to be driven by a multi-degree-of-freedom motion device. The magnetic levitation planar motion device can realize decoupling motion with six degrees of freedom, and this motion device can save intermediate transmission links, and has a compact structure, which is conducive to improving The motion efficiency of the motion platform can achieve higher positioning accuracy and motion acceleration. [0003] The six-degree-of-freedom magnetic levitation planar motor is used to drive the maglev planar motion device, which is divided into a moving coil type and a moving magnet type. Among them, the moving magnet type magnetic levitation planar motor has a better application prospect in the application of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K41/02
CPCH02K41/02H02K2201/18
Inventor 张霖池峰陈庆生段素丙刘小虎
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD