Clamping mechanism for handling substrates within a substrate carrier
A substrate carrier and substrate technology, which is applied in semiconductor devices, electrical solid state devices, semiconductor/solid state device manufacturing, etc., can solve problems such as unusable
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0021] In this section, we will explain several preferred embodiments of the present invention with reference to the accompanying drawings. Whenever the shapes, relative positions, and other aspects of components described in the embodiments are not clearly defined, the scope of the present invention is not limited to the components shown for illustrative purposes only. Additionally, while numerous details are set forth, it is understood that some embodiments of the invention may be practiced without these details. In other instances, well-known structures and techniques have not been shown in detail in order not to obscure the understanding of this description.
[0022] figure 1 An exploded top perspective view showing the clamping assembly of the substrate carrier. Clamping assembly 100 may include clamping plate 102 configured to clamp one or more of substrates 108 between top carrier plate 104 and bottom carrier plate 106 of substrate carrier 160 . Typically, clamping p...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


