Angular velocity sensor, electronic apparatus, and mobile object
An angular velocity sensor, angular velocity technology, applied in gyroscope/steering sensing equipment, gyro effect for velocity measurement, velocity/acceleration/shock measurement and other directions, can solve problems such as deterioration of detection characteristics of angular velocity sensor
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no. 1 approach
[0062] First, the angular velocity sensor of the first embodiment will be described.
[0063] figure 1 It is a schematic plan view showing the schematic structure of the angular velocity sensor of the first embodiment. Figure 2 ~ Figure 4 for figure 1 The main part of the enlarged model diagram, figure 2 It is the top view of the main part in enlarged mode, image 3 (a) is the top view of the enlarged mode of other main parts, image 3 (b) for image 3 A schematic cross-sectional view at line C-C in (a). also, Figure 4 (a) is an enlarged mode top view of other main parts, Figure 4 (b) for Figure 4 A schematic cross-sectional view at line D-D in (a). In addition, the X-axis, Y-axis, and Z-axis in the figure are mutually orthogonal coordinate axes, and the direction marked with the arrow is + (positive) direction.
[0064] like figure 1 As shown, the angular velocity sensor 1 includes, a substrate 10, which is substantially flat; a first mass portion 21, a second...
no. 2 approach
[0151] Figure 12 It is a schematic plan view showing the schematic structure of the angular velocity sensor of the second embodiment. In addition, the same code|symbol is attached|subjected to the part common to 2nd Embodiment, and detailed description is abbreviate|omitted, and it demonstrates centering on the part different from 2nd Embodiment.
[0152] like Figure 12 As shown, the angular velocity sensor 3 according to the second embodiment differs from the first embodiment in the driving directions and the like of the driving units 41 to 44 .
[0153] In the angular velocity sensor 3 , a fixing portion 45 is provided at an intersection where a line connecting the first pair of masses A and a line connecting the second pair of masses B intersect, and is formed in a curved shape from the fixing portion 45 . The movable part 46 is connected to each coupling part 31-34 by the diameter-shaped displacement absorbing part 46a.
[0154] Furthermore, the movable part 46 extend...
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