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Angular velocity sensor, electronic apparatus, and mobile object

An angular velocity sensor, angular velocity technology, applied in gyroscope/steering sensing equipment, gyro effect for velocity measurement, velocity/acceleration/shock measurement and other directions, can solve problems such as deterioration of detection characteristics of angular velocity sensor

Inactive Publication Date: 2015-11-11
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Therefore, the above-mentioned angular velocity sensor may have a detection characteristic degraded

Method used

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  • Angular velocity sensor, electronic apparatus, and mobile object
  • Angular velocity sensor, electronic apparatus, and mobile object
  • Angular velocity sensor, electronic apparatus, and mobile object

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0062] First, the angular velocity sensor of the first embodiment will be described.

[0063] figure 1 It is a schematic plan view showing the schematic structure of the angular velocity sensor of the first embodiment. Figure 2 ~ Figure 4 for figure 1 The main part of the enlarged model diagram, figure 2 It is the top view of the main part in enlarged mode, image 3 (a) is the top view of the enlarged mode of other main parts, image 3 (b) for image 3 A schematic cross-sectional view at line C-C in (a). also, Figure 4 (a) is an enlarged mode top view of other main parts, Figure 4 (b) for Figure 4 A schematic cross-sectional view at line D-D in (a). In addition, the X-axis, Y-axis, and Z-axis in the figure are mutually orthogonal coordinate axes, and the direction marked with the arrow is + (positive) direction.

[0064] like figure 1 As shown, the angular velocity sensor 1 includes, a substrate 10, which is substantially flat; a first mass portion 21, a second...

no. 2 approach

[0151] Figure 12 It is a schematic plan view showing the schematic structure of the angular velocity sensor of the second embodiment. In addition, the same code|symbol is attached|subjected to the part common to 2nd Embodiment, and detailed description is abbreviate|omitted, and it demonstrates centering on the part different from 2nd Embodiment.

[0152] like Figure 12 As shown, the angular velocity sensor 3 according to the second embodiment differs from the first embodiment in the driving directions and the like of the driving units 41 to 44 .

[0153] In the angular velocity sensor 3 , a fixing portion 45 is provided at an intersection where a line connecting the first pair of masses A and a line connecting the second pair of masses B intersect, and is formed in a curved shape from the fixing portion 45 . The movable part 46 is connected to each coupling part 31-34 by the diameter-shaped displacement absorbing part 46a.

[0154] Furthermore, the movable part 46 extend...

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PUM

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Abstract

An angular velocity sensor includes a substrate; a plurality of mass units which is disposed on the substrate; respective coupling units which couple the respective mass units (a first mass unit and a third mass unit, the third mass unit and a second mass unit, the second mass unit and a fourth mass unit, and a fourth mass unit and the first mass unit) adjacent to each other, among the plurality of mass units; and respective drive units which are disposed on the substrate and are connected to the respective coupling units, and the respective drive units drive the respective mass units (the first mass unit and the third mass unit, the third mass unit and the second mass unit, the second mass unit and the fourth mass unit, and the fourth mass unit and the first mass unit) adjacent to each other through the respective coupling units.

Description

technical field [0001] The present invention relates to an angular velocity sensor, electronic equipment including the angular velocity sensor, and a mobile body. Background technique [0002] Conventionally, as an angular velocity sensor corresponding to angular velocities around three detection axes, a gyroscope (hereinafter, referred to as an angular velocity sensor) having a structure by using an elastic coupling element (hereinafter, referred to as a coupling portion) is known. , so that a plurality of driving masses (hereinafter referred to as mass parts) arranged on the substrate are combined with each other, and at least one mass part is driven to perform driving motion (hereinafter referred to as driving vibration) by the driving part, so that the The driving vibration is transmitted to other mass parts via the coupling part, and the applied angular velocity is detected by the detection vibration of the detection part provided on the plurality of mass parts while th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5719
CPCG01C19/5719G01C19/574
Inventor 泷泽照夫
Owner SEIKO EPSON CORP